目的 对单晶金刚石进行紫外激光加工，分析紫外激光对金刚石的辐刻效果。方法 在真空环境中，采用波长248 nm（KrF）、脉冲能量500~700 mJ、脉冲频率1~9 Hz、激光功率0.5~6.3 W的脉冲激光对单晶金刚石靶材进行了辐照，并采用光发射谱（OES）对辐照过程中产生的等离子体进行了诊断，采用扫描电镜（SEM）和拉曼谱（Raman）对辐照后的金刚石进行了表征与分析。结果 激光辐照后的金刚石发生了凿刻现象，激光的辐刻速率受脉冲频率的影响显著，存在一个频率阈值，使辐刻速率不再随脉冲频率和能量发生明显变化。激光辐刻金刚石过程中产生的等离子体以C3激元为主，其余为C1和C2激元。结论 实验表明，激光在辐刻金刚石过程中产生等离子体，是造成激光脉冲频率和脉冲能量对辐刻速率具有阈值特性这一现象的主要原因。此外，紫外脉冲激光辐刻后的金刚石沟槽表面光洁，不存在明显裂纹。

The work aims to study the processing of single crystal diamond by ultraviolet laser and analyze the trench effect. In vacuum, a single crystal diamond was irradiated by a pulse laser with 248 nm(KrF) wavelength, 500~700 mJ pulse energy, 1~9 Hz pulse frequency and 0.5~6.3 W laser power. The generated plasma was diagnosed by optical emission spectrum (OES). The trenched diamond was characterized and analyzed by Raman spectrum and scan electronic microscope (SEM). The trench was found on the diamond surface after laser irradiation. The trenching rate was obviously subject to laser frequency till the pulse frequency arrived at a threshold value to keep the trenching rate unchanged as the pulse frequency and energy. The laser-induced plasma wasmainly composed of C3, while C1 and C2 were ones else. The influence of laser frequency and energy on the trenching rate ismainly due to the laser-induced plasma. Besides, the surface of the micro-groove of diamond issmooth without obvious cracks after laser trenching.