目的 在室温条件下,采用物理气相沉积(PVD)磁控溅射沉积方法,通过控制 Si 靶功率制备具有不同 Si 含量的 CrSiN 涂层,以探究 Si 元素对涂层结构和性能的影响。 方法 通过 X 射线衍射、能谱仪测试、纳米压痕测试、维氏硬度压痕测试和摩擦磨损实验,分别评价 CrSiN 涂层的结构、硬度、韧性和耐磨性能,并通过扫描电子显微镜对压痕形貌进行分析。 结果 所有 CrSiN 涂层均呈(111),(200) 取向的NaCl 结构。 随着 Si 含量增加,XRD 峰呈宽化趋势,晶粒细化效果明显。 随 Si 元素的加入,CrSiN 涂层硬度、模量和韧性均呈先增加后降低的趋势。 相比 CrN 涂层,Si 的原子数分数为 3. 2% 时,CrSiN 涂层的硬度由 21. 4 GPa 增至 35. 7 GPa,模量由 337. 7 GPa 增至 383. 9 GPa,塑性指数由 0. 5 增至 0. 55,实现了强韧一体化。 加入 Si 元素,CrSiN 涂层的耐磨损性能得到改善,且 Si 的原子数分数为 3. 2% ,磨损率最低,为1. 0×10-17 m3 / (N·m),提高了约一个数量级。 结论 Si 元素的加入可以有效改善 CrSiN 涂层的结构,提高 CrSiN 涂层的硬度、韧性和磨损性能,但需加入适量的 Si,才可实现性能最优化。

Objective To prepare the CrSiN coatings with different Si contents through controlling Si target power using physical vapor deposition (PVD) magnetron sputtering method at room temperature so as to explore the influence of Si content on structure and properties of coating. Methods The structure, hardness, toughness and wear resistance of CrSiN coating were respectively evaluated by X-ray diffraction, energy dispersive spectroscopy testing, nanoindentation test, Vickers indentation and friction test. And the indentation morphology was analyzed further by scanning electron microscope. Results The results indicated that all coatings showed (111), (200) orientation of the NaCl structure. With increasing Si content, XRD peak turned wider and the grain refinement effect was obvious. With adding Si element, the hardness, modulus and toughness increased firstly and then decreased. Compared to CrN coating, the hardness increased from 21. 4 GPa to 35. 7 GPa, modulus improved from 337. 7 GPa to 383. 9 GPa and plasticity index increased to 0. 55 from 0. 5, achieving an integration of hard and tough for CrSiN coating with Si content at 3. 2% . The wear resistance of CrSiN coating was improved by almost an order of magnitude and the wear rate was the lowest (1. 0 ×10 -17 m3 / (N·m)) when Si content was 3. 2% . Conclusion The structure can be obviously improved, and the hardness, toughness and wear resistance can be increased by adding silicon in CrSiN coating. However, the amount of Si element needs to be added appropriately for performance optimization.