近年来,材料纳米级力学测试日益引起广大研究者的重视。 纳米压痕仪凭借极高的载荷和位移分辨率,广泛应用于材料表面的微纳米级力学性能的测试,包括硬度、弹性模量、塑性应变、薄膜界面结合强度以及材料疲劳特性等。 综述了几种纳米压痕和纳米冲击技术测试材料力学性能的方法和原理,介绍了纳米压痕技术在材料力学性能测试方面的若干先进应用实例及其测试机理,以及原子力显微镜和扫描探针显微镜在力学测试方面的原理和应用。 最后,提出了纳米压痕仪存在的若干问题,并对纳米压痕技术的发展进行了展望,认为纳米压痕技术结合有限元模拟建立材料疲劳断裂模型,是纳米压痕在力学测试方面发展的必然趋势。

Nanoscale mechanical testing has attracted increasing attention of researchers in recent years. Nanoindentor is widely used in micro/ nanoscale mechanical testing of material surface due to its high loading and displacement resolution, including hardness, elasticity modulus, plastic strain, combinative strength of film interface and fatigue properties of materials. In this paper, the methods and principles for several kinds of material mechanical property tests using nanoindentation and Nano-impact techniques were reviewed. Then many advanced applications of nanometer indentation technology in material mechanical property testing and its test mechanism were introduced, as well as the application and principle of atomic force microscopy and scanning probe microscopy testing in mechanical testing. Finally, the author put forward several existing problems of nanoindentor, and prospected the development of nanoindentation. It was found that establishment of material fatigue fracture model by nanoindentation technique in combination with the finite element simulation is the inevitable development trend of nanoindentation in mechanical testing.