Effect of Magnetron Sputtering Power on the Structure and Properties of Deposition W on the Surface of Lead Frames

ZHANG Guang-yao, GAO Yuan, ZHANG Yan, WANG Cheng-lei, WEI Wen-zhu, LU Xiao-hui

Surface Technology ›› 2014, Vol. 43 ›› Issue (6) : 33-36,63.

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PDF(1955 KB)
Surface Technology ›› 2014, Vol. 43 ›› Issue (6) : 33-36,63.

Effect of Magnetron Sputtering Power on the Structure and Properties of Deposition W on the Surface of Lead Frames

  • ZHANG Guang-yao, GAO Yuan, ZHANG Yan, WANG Cheng-lei, WEI Wen-zhu, LU Xiao-hui
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Abstract

Objective To study the technology and properties of depositing metal W film on the surface of iron-based lead frames, which had been deposited with Cu. Methods Tungsten films layer was prepared by vacuum magnetron sputtering deposition technique, and then the structure and properties of the deposited layers were analyzed by SEM, EDS, XRD and other techniques. Results Under certain operating conditions of pressure, temperature and deposition time, the thickness of tungsten deposition layers increased with the increase of sputtering power, but the increase was nonlinear. The film thickness uniformity of the deposited layer was good, with dense structure and strong binding force with the substrate. The deposited layer films by magnetron sputtering W had low impurity content and stable chemical composition, the deposition process W atoms preferred growth along the (110) crystal plane, and there was deviation in XRD peaks. The tungsten deposition layers had good electrical conductivity, its resistivity was less than 1. 5×10 -6 Ω·m, and the resistance temperature coefficient was less than 0. 0052 / ℃ . Tungsten deposition layer had good oxidation resistance, oxide layer did not occur after 8-hour baking at 180 ℃ . Conclusion Depositing metal tungsten on the surface of the lead frames resulted in uniform and dense films, with good adhesion, conductivity and oxidation resistance.

Key words

magnetron sputtering; film; tungsten; conductivity; binding force

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ZHANG Guang-yao, GAO Yuan, ZHANG Yan, WANG Cheng-lei, WEI Wen-zhu, LU Xiao-hui. Effect of Magnetron Sputtering Power on the Structure and Properties of Deposition W on the Surface of Lead Frames[J]. Surface Technology. 2014, 43(6): 33-36,63

Funding

Supported by the National Science Foundation of China (51264007, 51201043), Guangxi Science and Technology Development of Science and Tech-nology Research Project (12118020-2-2-1) and Guangxi Key Laboratory of Information Materials Project (1210908-214-Z)
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