Ansys Simulation and Optimization of Electroforming Uniformity of Double Micro Gear Insert Block

YUE Biao, QIN Zong-hui

Surface Technology ›› 2014, Vol. 43 ›› Issue (4) : 52-58.

PDF(5534 KB)
PDF(5534 KB)
Surface Technology ›› 2014, Vol. 43 ›› Issue (4) : 52-58.
Research and Exploration

Ansys Simulation and Optimization of Electroforming Uniformity of Double Micro Gear Insert Block

  • YUE Biao, QIN Zong-hui
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Abstract

Objective To improve the electroforming uniformity of double micro gear die cavity inserts in the process of electroforming. Methods First of all, the electric field intensity distribution on the double micro gear cavity inserts in the electroforming process was simulated with Ansys, and the method of applying insulating baffle was proved to be feasible. Second, the effects of insulating baffle geometry and position size on the electric field intensity was investigated using the orthogonal experiment method. Finally, the application of grey theory was used in finding the optimal combination of process parameters. Results Ansys simulation results showed that the application of insulating baffle under certain conditions could increase the uniformity and evenness of the thickness of photoresist electroforming layer. The relative error of path a was reduced from 62. 48% to 33. 18% . The relative error of path b was reduced from 48. 01% to 8. 91% . Conclusion By applying insulating baffle, the uniformity of the cast layer was improved during the electroforming process of double micro gear die cavity inserts.

Key words

uniformity of cast layer; Ansys; orthogonal experiment; grey correlation

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YUE Biao, QIN Zong-hui. Ansys Simulation and Optimization of Electroforming Uniformity of Double Micro Gear Insert Block[J]. Surface Technology. 2014, 43(4): 52-58

Funding

Supported by the Specific Funding Project of the State Key Laboratory of Integrated Circuit and System in Fudan University (10KF006)
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