Influence of Magnetron Sputtering Parameters on Surface Properties of TiN-coated Bearing Steel

XIONG Xiao-chen, HAN Xiao-qi, YAN Nu

Surface Technology ›› 2014, Vol. 43 ›› Issue (1) : 67-70,89.

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Surface Technology ›› 2014, Vol. 43 ›› Issue (1) : 67-70,89.
Applied Technology

Influence of Magnetron Sputtering Parameters on Surface Properties of TiN-coated Bearing Steel

  • XIONG Xiao-chen, HAN Xiao-qi, YAN Nu
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Abstract

Objective To investigate the influence of magnetron sputtering parameters including sputtering power and sputtering time on surface properties. Methods The hardness tests and friction tests were carried out for TiN-coated bearing steel. Results Tests showed that hardness and wear resistance declined with the increase of deposition time, and when the sputtering power was 200 W, with a deposition time of 5 ~ 10 minutes, the hardness value reached 345. 23 ~ 353. 88 HV, and the wearing capacity was 2. 9 ~ 3. 4 mg; The hardness and wear resistance declined with the increase of sputtering power in the range of 70 ~ 200 W, the hardness value reached up to 577. 91 HV, and the wearing capacity was 0. 9 mg, when the deposition time was 30 minutes. Conclusion It was concluded from the testing results that the sputtering power was the predominant influencing factor. In order to improve the surface friction properties and hardness for bearing steels, the sputtering power should not be too high, and a sputteringpower of 100 W and a deposition time of 30 minutes was the most suitable sputtering condition.

Key words

magnetron sputtering; TiN film; bearing Steel; hardness; wearing resistance

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XIONG Xiao-chen, HAN Xiao-qi, YAN Nu. Influence of Magnetron Sputtering Parameters on Surface Properties of TiN-coated Bearing Steel[J]. Surface Technology. 2014, 43(1): 67-70,89

Funding

Fund: Supported by the Natural Science Foundation of China(51175298) , The Ministry of Education Scientific Research Returned People Start Fund Projects( [2011]15) , and The Innovation Fund of Graduate Student of The Three Gorges University(2013CX031)
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