Effects of Different Pulsed Bias Duty Cycle on the Microstructure and Hardness of TiN / TiAlN Multilayer Coatings

ZHANG Yan-xia, JING Zhi-qiang, WEN Zhen-hua, FEN Xian-zhang, WEI Yong-qiang

Surface Technology ›› 2014, Vol. 43 ›› Issue (1) : 1-6,39.

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PDF(392 KB)
Surface Technology ›› 2014, Vol. 43 ›› Issue (1) : 1-6,39.
Research and Exploration

Effects of Different Pulsed Bias Duty Cycle on the Microstructure and Hardness of TiN / TiAlN Multilayer Coatings

  • ZHANG Yan-xia1, JING Zhi-qiang2, FEN Xian-zhang2, WEN Zhen-hua3, WEI Yong-qiang3
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Abstract

Objective To study the effects of pulsed bias duty cycle on the microstructure and hardness of TiN / TiAlN multilayer coatings. Methods Five TiN / TiAlN multilayer coatings with different pulsed bias duty cycle were deposited by the pulse biased arc ion plating method on M2 high speed steel substrates, and the microstructure, composition, phase structure and hardness of the multilayer coatings were investigated. Results TiN / TiAlN multilayer coatings surface exhibited a typical growth morphology prepared by arc ion plating. The amount of macroparticles was significantly reduced with increasing pulsed bias duty cycle. The increase of pulsed bias duty cycle also caused the decrease of Al / Ti atomic ratio in the multilayer coatings. Conlusion TiN / TiAlN multilayer coatings preferred (111) orientation growth, and meanwhile contained (311) , (222) and (200) crystallographic structure. The nanohardness of five multilayer coatings was higher than 33 GPa. At 20% pulsed bias duty cycle, the super hard coatings were prepared.

Key words

TiN/TiAlN; arc ion plating; nanohardness; microstructure; pulsed bias duty cycle

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ZHANG Yan-xia, JING Zhi-qiang, WEN Zhen-hua, FEN Xian-zhang, WEI Yong-qiang. Effects of Different Pulsed Bias Duty Cycle on the Microstructure and Hardness of TiN / TiAlN Multilayer Coatings[J]. Surface Technology. 2014, 43(1): 1-6,39

Funding

Supported by the Natural Science Foundation of China(51105344) , the Aviation Foundation of China (2012ZE55011) , the Science and Technology Research Projects of Henan Education Committee(13A430397 and 14A140026) , the Basic and Frontier Technology Research Foundation of S&T Committee of Henan Province(132300410241) , the Program for Science & Technology Innovative Research Team in University of Henan Province (2012IRTSTHN014) ,Zhengzhou Institute of Aeronautical Industry Management (2014TD01)
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