A combination of arc and magnetron sputtering deposition technology was used to synthesize the C / TiAlSiN hard coatings with different C incorporation modes on the high-speed steel substrates. The coating ’ s composition, microstructure, microhardness and wearing properties were studied and compared with that of TiAlSiN coatings which has none-C incorporation. It was found that the coatings had different microstructure and properties with different C incorporation mode. The incorporation of C during the TiAlSiN coating synthesis was very useful to optimize the coating’s microstructure and micro hardness,and also good for its wearing properties.