The ZrN / Zr films were deposited on stainless steel and aluminum substrates by mid-frequency twin-targets magnetron sputtering technology. The thickness, chromaticity, and surface morphology of ZrN / Zr films were characterized. And the influences of nitrogen flow on deposition rate and chromaticity of ZrN / Zr films were studied. The results show that the deposition rate decreases first with the increase of nitrogen flow, then increases. Nitrogen flow between 2 . 5 X 10^-10and 3 . 5 X 10^-10m³/ s, the influence of nitrogen flow on deposition rate is very small . With the increase of nitrogen flow, the color of the film changes regularly. In the range of 2 . 5 X10^-10~ 3 . 5 X10^-10m³/ s, the gold ZrN films are bright and density.