PDF(3600 KB)
Study on Grid Characteristic of Four-gridded Ion Energy Analyzer
WANG Fei-fei, PAN Yong-qiang, HANG Ling-xia, MI Qian
Surface Technology ›› 2013, Vol. 42 ›› Issue (2) : 34-36,83.
PDF(3600 KB)
PDF(3600 KB)
Study on Grid Characteristic of Four-gridded Ion Energy Analyzer
ion energy; gridded ion energy analyzer; Simion simulation; four-grid
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