Influence of Negative Bias on TiAlN Films by Arc Ion Plating

HUANG Mei-dong, XU Shi-peng, LIU Ye, XUE Li, PAN Yu-peng, FAN Xi-ying

Surface Technology ›› 2012, Vol. 41 ›› Issue (6) : 1-3,6.

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PDF(4163 KB)
Surface Technology ›› 2012, Vol. 41 ›› Issue (6) : 1-3,6.

Influence of Negative Bias on TiAlN Films by Arc Ion Plating

  • HUANG Mei-dong, XU Shi-peng, LIU Ye, XUE Li, PAN Yu-peng, FAN Xi-ying
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Abstract

TiAlN thin films were fabricated via arc ion plating on the W18Cr4V high-speed steel under different negative biases. The influence of negative bias on the microstructure, phase, and crystalline orientation, hardness, and deposition rate of the films were investigated. The results show that the films have a coarse surface at too high or too low biases, resulting in lower hardness. The largest deposition rate is achieved at -200 V bias. The TiAlN thin film has a (111) preferred orientation when deposited at -150 V bias, where the largest hardness is achieved.

Key words

arc ion plating; TiAlN thin film; negative bias

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HUANG Mei-dong, XU Shi-peng, LIU Ye, XUE Li, PAN Yu-peng, FAN Xi-ying. Influence of Negative Bias on TiAlN Films by Arc Ion Plating[J]. Surface Technology. 2012, 41(6): 1-3,6
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