PDF(4163 KB)
Influence of Negative Bias on TiAlN Films by Arc Ion Plating
HUANG Mei-dong, XU Shi-peng, LIU Ye, XUE Li, PAN Yu-peng, FAN Xi-ying
Surface Technology ›› 2012, Vol. 41 ›› Issue (6) : 1-3,6.
PDF(4163 KB)
PDF(4163 KB)
Influence of Negative Bias on TiAlN Films by Arc Ion Plating
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