The Effect of Ti Content on Mechanical Properties of DLC Films

ZHU Wen, RAN Chun-hua, JIN Yi-dong, NIE Chao-yin, WANG Zhen-lin

Surface Technology ›› 2012, Vol. 41 ›› Issue (5) : 7-10.

PDF(4149 KB)
PDF(4149 KB)
Surface Technology ›› 2012, Vol. 41 ›› Issue (5) : 7-10.
Research and Exploration

The Effect of Ti Content on Mechanical Properties of DLC Films

  • ZHU Wen, RAN Chun-hua, JIN Yi-dong, NIE Chao-yin, WANG Zhen-lin
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Abstract

Using unbalanced magnetron sputtering technique, diamond-like carbon films with different titanium contents(Ti-DLC)were deposited on stainless steel substrates by changing Ti target supttering current. Investigated the influences of Ti content on microhardness, elastic modulus, film-substrate cohesion, fracture toughness, friction and wear behavior of films. Results showed that the hardness of the Ti-DLC films increases obviously compared with the pure DLC films. In the meantime, the hardness of the Ti-DLC films increases first and then decreases with the increase of the Titarget sputtering current and reaches the highest when Ti target sputtering current is increased to 1.5A. Film-substrate cohesion and fracture toughness of the films are improved by depositing some Ti. The friction coefficient of DLC films decreases significantly with the deposition of Ti.

Key words

unbalanced magnetron sputtering; Ti-DLC; cohesion; tribological and wear properties

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ZHU Wen, RAN Chun-hua, JIN Yi-dong, NIE Chao-yin, WANG Zhen-lin. The Effect of Ti Content on Mechanical Properties of DLC Films[J]. Surface Technology. 2012, 41(5): 7-10
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