By pulsed laser deposition method, target-substrate distance were controlled with 4,6,8 cm respectively. Thin films of indium zinc oxide, indium tin oxide and aluminum doped ZnO were deposited on polyethylene terephthalate substrate, the effect of the film electrical, optical, morphological and structural characteristics on target-substrate distance was studied. The research results show that optical transmittance of TCO thin films deposited by 6~8 cm target-substrate distance is more than 90% in the visible range, the resistivity is about 5×10-4Ω·cm; In addition to these excellent electrical and the optical properties, the films deposited by 8 cm target-substrate distance is uniform, smooth, good attached, and no cracks or any other extended defects, applied in optoelectronic devices.