Structure and Properties of Magnetron Sputtered V-Al-N Coatings

ZHU Ping, GE Fang-fang, LI Sheng-zhi, HUANG Feng

Surface Technology ›› 2012, Vol. 41 ›› Issue (4) : 46-48.

Surface Technology ›› 2012, Vol. 41 ›› Issue (4) : 46-48.
Research and Exploration

Structure and Properties of Magnetron Sputtered V-Al-N Coatings

  • ZHU Ping, GE Fang-fang, LI Sheng-zhi, HUANG Feng
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Abstract

V1-xAlxN(0≤x≤0.67)coatings were prepared by reactive magnetron co-sputtering. The effect of Al content on the phase, microstructure, mechanical properties and tribological behavior was studied. The result show that while a columnar structure is maitained in the V1-xAlxN(0≤x≤0.51)coatings, they are progressively densified with AlN addition. Simultaneously, the hardness is nearly quadrupled for the V0.49Al0.51N coating showing a very dense, non-columnar microstructure as compared with VN; Hard(>30GPa)coatings can be found over a moderate range of composition and the microstructures, and the highest value is 41 GPa; Concomitant with the hardness improvement, the V1-xAlxNcoatings exhibites superior wear resistance to that of the VN coating.

Key words

reactive magnetron sputtering; V-Al-N coating; microstructure; friction and wear

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ZHU Ping, GE Fang-fang, LI Sheng-zhi, HUANG Feng. Structure and Properties of Magnetron Sputtered V-Al-N Coatings[J]. Surface Technology. 2012, 41(4): 46-48

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