The TiO2 films were prepared on metal substrates by sol-gel method, and showed hydrophobicity after modified with low-surface-energy material 1H,1H,2H,2H-perfluoro-decyltrimethoxysilane(FAS). The heat-stability of TiO2 gel was investigated by thermogravimetric analysis(TG), and the result displayed that the organic matter was completely decomposed when the temperature was no lower than 450 ℃. The morphology, phases and the crystallo-graphic structures of as-prepared films were charactered. The effect of heat-treatment of TiO2 film on morphology and wettability was investigated. The results indicated that the TiO2 film showed superhyphobicity heat-treated at 550℃.