The 316Ti stainless steel rivets were treated respectively by four different technologies of conventional ion nitriding, cyclic ion nitriding and cyclic N/C/O penetration and cyclic N/C/O/S penetration. The samples were characterized. The influence of cyclic nitriding technologies and C,O,S penetration elements on the 316Ti steel layer structure and corrosion resistance were analyzed. The result shows that the diffusion layers of the samples cyclic nitrided are deeper and the corrosion resistance hardly be changed, compared with conventional ion nitriding; In N/C/O penetration, adding the elements of C,O were benefit for enhancing layer depth and restraining CrN precipitation, as well as decreasing the poor Cr degree of matrix surface, and improving corrosion resistance of the sample processed, S can decrease corrosion resistance of the sample processed by penetration.