Effect of Film Thickness on the Color of Magnetron Sputtering ZrN Films

SUN Wei-lian, AN Guang, SUN Bo, WANG Hui-qiang, LI Xin-ling

Surface Technology ›› 2012, Vol. 41 ›› Issue (2) : 47-49,78.

PDF(3520 KB)
PDF(3520 KB)
Surface Technology ›› 2012, Vol. 41 ›› Issue (2) : 47-49,78.
Research and Exploration

Effect of Film Thickness on the Color of Magnetron Sputtering ZrN Films

  • SUN Wei-lian, AN Guang, SUN Bo, WANG Hui-qiang, LI Xin-ling
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Abstract

The ZrN film was prepared on the mirror stainless steel plate by using unbalanced magnetron sputtering technique. The thickness of ZrN films was controlled by changing the coating time. The L* ,a* ,b* values of the ZrN thin films with different thickness was measurea with X-rate colorimeter. The curve about the L* ,a* ,b* values of the ZrN thin films with different thickness was draw out. The color variation of the magnetron sputtering ZrN films effected by the film thickness is obtained: when film thickness is less than about 63.7 nm, with the film thickness increasing, the L* ,a* values do not change, b* values are increase by linear, and the color of the film become gold gradually; when film thickness is over about 63.7 nm, with the film thickness increasing, the chromaticity coordinates of the film has no significant change, and the color is stable gold.

Key words

deposition rate; film thickness; ZrN film; color

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SUN Wei-lian, AN Guang, SUN Bo, WANG Hui-qiang, LI Xin-ling. Effect of Film Thickness on the Color of Magnetron Sputtering ZrN Films[J]. Surface Technology. 2012, 41(2): 47-49,78
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