PDF(3514 KB)
EffectofNegativeBiasVoltageonTiNCoatingDepositedbyMAIP
WANG Cheng-lei, CAI Hang-wei, GAO Yuan, MA Zhi-kang, YUAN Lin, ZHANG Wei
Surface Technology ›› 2012, Vol. 41 ›› Issue (1) : 20-22,26.
PDF(3514 KB)
PDF(3514 KB)
EffectofNegativeBiasVoltageonTiNCoatingDepositedbyMAIP
MAIP; negative bias voltage; TiN coating; corrosion resistance
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