Optimization of a Three-section Arc-shaped Flow Channel in a Magnetohydrodynamic Polishing Disc

WANG Zhaopei, FENG Ming, CHEN Zhixiang, FANG Zheng, JIANG Min, LI Min

Surface Technology ›› 2026, Vol. 55 ›› Issue (15) : 40-52.

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Surface Technology ›› 2026, Vol. 55 ›› Issue (15) : 40-52. DOI: 10.16490/j.cnki.issn.1001-3660.2026.15.004
Precision and Ultra-precision Machining

Optimization of a Three-section Arc-shaped Flow Channel in a Magnetohydrodynamic Polishing Disc

  • WANG Zhaopei1, FENG Ming1a,1b,2,3, CHEN Zhixiang1a,1b,*, FANG Zheng2, JIANG Min2, LI Min3
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Abstract

Lithium niobate (LiNbO3) crystals, renowned for their exceptional electro-optical and acousto-optical properties, are indispensable substrate materials for high-frequency filters and optical waveguides. However, their intrinsic characteristics such as high hardness, brittleness, and strong anisotropy pose significant challenges to ultra-precision machining. Conventional contact polishing techniques often result in low material removal rates, surface scratches, and subsurface damage. To overcome these limitations and achieve high-efficiency, damage-free planarization, the work aims to propose an integrated optimization strategy based on hydrodynamic lubrication theory. The strategy combines flow-channel geometry design, Python-based machine-learning parametric modeling and optimization, and validation through 3D transient numerical simulations with ANSYS Fluent. The objective is to significantly enhance the hydrodynamic effect and load-carrying capacity while improving the uniformity of the pressure distribution by scientifically reconstructing the flow-field characteristics, thereby enabling efficient, stable, and low-damage ultra-precision polishing of hard and brittle materials. Firstly, a parametric model of the arc-shaped flow channel was established, identifying key geometric variables (X1, X2, X3). Through Python programming, Latin Hypercube Sampling (LHS) was employed to generate a representative dataset. This dataset was then fitted to a nonlinear polynomial regression model via the Scikit-learn library to accurately map the complex relationship between the channel parameters (X1, X2, X3) and the maximum dynamic pressure Pmax. Subsequently, the Sequential Least Squares Quadratic Programming (SLSQP) algorithm was applied to solve the constrained optimization problem, determining the optimal geometric-parameter combination that maximizes hydrodynamic pressure. To validate the design and explore the effects of process parameters, a three-dimensional transient flow-field model was developed with Ansys Fluent. The simulation results indicated that the optimized arc-shaped channel significantly outperformed the traditional trapezoidal design, increasing the average dynamic pressure on the workpiece surface by approximately 35%, thereby demonstrating the effectiveness of the optimization strategy. Furthermore, the effects of key process parameters on the magnitude and uniformity of dynamic pressure were systematically analyzed. The results revealed that the speed ratio $|i|$was a key factor controlling flow-field behavior. At low-speed ratios ($|i|\leqslant1$), the pressure distribution was asymmetric and unstable. However, at high-speed ratios ($|i|\geqslant2$), particularly at a ratio of 10∶1, the dynamic pressure exhibited a highly stable, axisymmetric concentric-haoring distribution. Under these conditions, the dynamic-pressure non-uniformity coefficient (Mp) reached a minimum value of 56.93%, indicating optimal uniformity. The working gap had a differentiated impact on polishing-performance parameters. While the average dynamic pressure was relatively insensitive to variations in the gap, the load-carrying capacity Fc showed a distinct peak at a gap of 100 μm, identifying this as the ideal value for stable machining. In addition, increasing the solid volume fraction of silica nanoparticles in the polishing fluid was shown to effectively enhance dynamic-pressure performance. Higher solid content significantly increased fluid viscosity, resulting in substantial improvements in both dynamic pressure and load-carrying capacity. In conclusion, this work demonstrates that the MA-HDP method, supported by an optimized arc-shaped flow channel and appropriate process parameters, can generate a robust and uniform hydrodynamic pressure film. These findings provide a solid theoretical foundation and valuable technical reference for optimizing ultra-precision polishing processes for LiNbO3 and other hard, brittle materials, ensuring a balance between high processing efficiency and excellent surface integrity.

Key words

magnetohydrodynamic polishing / arc-shaped flow channel / Fluent / speed ratio / uniformity / low damage

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WANG Zhaopei, FENG Ming, CHEN Zhixiang, FANG Zheng, JIANG Min, LI Min. Optimization of a Three-section Arc-shaped Flow Channel in a Magnetohydrodynamic Polishing Disc[J]. Surface Technology. 2026, 55(15): 40-52

References

[1] 田业冰, 魏成伟, 宋晓梅, 等. 铌酸锂晶体超精密加工技术研究进展[J]. 金刚石与磨料磨具工程, 2024, 44(6): 695-724.
TIAN Y B, WEI C W, SONG X M, et al.Recent Advances in Ultra-Precision Machining of Lithium Niobate Crystals[J]. Diamond & Abrasives Engineering, 2024, 44(6): 695-724.
[2] 杨春颖, 常耀辉, 陈亚楠. 铌酸锂晶片的抛光机理及损伤层控制研究[J]. 电子工业专用设备, 2023, 52(5): 26-28.
YANG C Y, CHANG Y H, CHEN Y N.Study on Polishing Mechanism and Damage Layer Control of Lithium Niobate Wafers[J]. Equipment for Electronic Products Manufacturing, 2023, 52(5): 26-28.
[3] 黄水泉, 高尚, 黄传真, 等. 脆性材料磨粒加工的纳米尺度去除机理[J]. 金刚石与磨料磨具工程, 2022, 42(3): 257-267.
HUANG S Q, GAO S, HUANG C Z, et al.Nanoscale Removal Mechanisms in Abrasive Machining of Brittle Solids[J]. Diamond & Abrasives Engineering, 2022, 42(3): 257-267.
[4] 贡燕, 胡天明, 张丽慧, 等. 温度对铌酸锂晶片磨削减薄的影响[J]. 表面技术, 2017, 46(7): 233-239.
GONG Y, HU T M, ZHANG L H, et al.Effects of Temperature on Grinding and Thinning of Soft-Brittle Lithium Niobate Crystals[J]. Surface Technology, 2017, 46(7): 233-239.
[5] JEONG S, LEE H, CHO H, et al.Effect of Additives for Higher Removal Rate in Lithium Niobate Chemical Mechanical Planarization[J]. Applied Surface Science, 2010, 256(6): 1683-1688.
[6] 杨静, 杨洪星, 韩焕鹏, 等. 铌酸锂晶片抛光的主要物理及化学因素分析[J]. 材料导报, 2017, 31(S2): 273-276.
YANG J, YANG H X, HAN H P, et al.Analysis of Physical and Chemical Factors of Chemical Mechanical Polishing about Lithium Niobate[J]. Materials Review, 2017, 31(S2): 273-276.
[7] 李攀, 白满社, 邢云云, 等. LiNbO3芯片的无损边缘抛光实验[J]. 应用光学, 2014, 35(6): 1069-1074.
LI P, BAI M S, XING Y Y, et al.Experiment on Defect-Free Edge Polishing of LiNbO3 Chips[J]. Journal of Applied Optics, 2014, 35(6): 1069-1074.
[8] KIM N H, SEO Y J, LEE W S.Temperature Effects of Pad Conditioning Process on Oxide CMP: Polishing Pad, Slurry Characteristics, and Surface Reactions[J]. Microelectronic Engineering, 2006, 83(2): 362-370.
[9] 朱永伟, 王军, 李军, 等. 固结磨料抛光垫抛光硅片的探索研究[J]. 中国机械工程, 2009, 20(6): 723-727.
ZHU Y W, WANG J, LI J, et al.Research on the Polishing of Silicon Wafer by Fixed Abrasive Pad[J]. China Mechanical Engineering, 2009, 20(6): 723-727.
[10] ZHU N N, ZHENG F Z, ZHU Y W, et al.Research of Abrasive Embedment-Free Lapping on Soft-Brittle Lithium Niobate Wafer[J]. The International Journal of Advanced Manufacturing Technology, 2016, 87(5): 1951-1956.
[11] ZHU N N, ZHANG S B, ZHU Y W, et al.Effects of Nano Mechanical Properties on LiNbO3 Fixed Abrasive Lapping[J]. Integrated Ferroelectrics, 2017, 182(1): 119-126.
[12] ZHU N N, ZHU Y W, XU J, et al.Modeling and Validation of Indentation Depth of Abrasive Grain into Lithium Niobate Wafer by Fixed-Abrasive Lapping[J]. Transactions of Nanjing University of Aeronautics and Astronautics, 2018, 34(1): 97-104.
[13] 李敏, 袁巨龙, 吕冰海, 等. Si3N4陶瓷的剪切增稠抛光[J]. 机械工程学报, 2017, 53(9): 193-200.
LI M, YUAN J L, LYU B H, et al.Shear-Thickening Polishing of Si3N4 Ceramics[J]. Journal of Mechanical Engineering, 2017, 53(9): 193-200.
[14] CHEN Y S, JIANG L, QIAN L M.Micro-Scratches Generation Mechanism by Copper Oxides Adhered on Silica Abrasive in Copper Chemical Mechanical Polishing[J]. Tribology International, 2024, 194: 109434.
[15] GAO P, LI J, ZHU Y W, et al.Study on Subsurface Damage after Fixed-Abrasive Lapping with Different Particle Size[J]. Solid State Phenomena, 2011, 175: 112-115.
[16] LI M, KARPUSCHEWSKI B, OHMORI H, et al.Adaptive Shearing-Gradient Thickening Polishing (AS-GTP) and Subsurface Damage Inhibition[J]. International Journal of Machine Tools and Manufacture, 2021, 160: 103651.
[17] YU Z, WANG J H, DU J H, et al.Effect of Temperature on Material Removal Rate during Shear-Thickening Polishing[J]. Materials, 2025, 18(9): 2033.
[18] SUN B C, WANG Z X, ZHAO Y, et al.Research Progress of Shear-Thickening Polishing Technology: A Review[J]. Precision Engineering, 2025, 95: 322-349.
[19] WEN D H, PIAO Z Y, ZHANG T H.A Hydrodynamic Suspension Polishing Method for Ultrasmooth and Low-Damage Surface[J]. Precision Engineering, 2016, 46: 278-287.
[20] PENG W Q, GUAN C L, LI S Y.Ultrasmooth Surface Polishing Based on the Hydrodynamic Effect[J]. Applied Optics, 2013, 52(25): 6411-6416.
[21] PIAO Z Y, WEN D H, YIN L Z, et al.Ultra-Smooth Cu Surface Fabricated by Hydrodynamic Suspension Polishing Technique[J]. Precision Engineering, 2019, 57: 189-194.
[22] 付振峰, 王振忠, 王彪, 等. 光学元件超光滑表面的流体动压抛光特性研究[J]. 制造技术与机床, 2022(6): 11-17.
FU Z F, WANG Z Z, WANG B, et al.Hydrodynamic Effect Polishing Characteristics of Ultra-Smooth Surfaces of Optical Components[J]. Manufacturing Technology & Machine Tool, 2022(6): 11-17.
[23] 卢凯锋, 孔凡志, 文东辉. 翼型悬浮抛光液动压流场的数值模拟[J]. 高技术通讯, 2024, 34(1): 54-61.
LU K F, KONG F Z, WEN D H.Numerical Simulation of Hydrodynamic Pressure Field during Airfoil Suspension Polishing Process[J]. Chinese High Technology Letters, 2024, 34(1): 54-61.
[24] 李刚, 张利, 文东辉. 动压浮离抛光盘结构化流道的液流特性[J]. 上海交通大学学报, 2014, 48(11): 1606-1612.
LI G, ZHANG L, WEN D H.Flow Field Characteristics of Hydrodynamic Polishing Base Plate with Different Structural Flow Passages[J]. Journal of Shanghai Jiao Tong University, 2014, 48(11): 1606-1612.
[25] 郑子军, 李攀星, 蔡东海, 等. 液动压悬浮抛光流场的数值模拟及抛光工具盘结构优化[J]. 中国机械工程, 2019, 30(6): 638-643.
ZHENG Z J, LI P X, CAI D H, et al.Numerical Simulation of Hydrodynamic Suspension Polishing Processes and Optimization of Polishing Tool Structures[J]. China Mechanical Engineering, 2019, 30(6): 638-643.
[26] 郑子军, 尹林志, 文东辉, 等. 液动压悬浮抛光工具盘承载力的研究[J]. 机械工程学报, 2021, 57(3): 247-254.
ZHENG Z J, YIN L Z, WEN D H, et al.Suspension Force Capacity of Polishing Tool during Hydrodynamic Suspension Polishing[J]. Journal of Mechanical Engineering, 2021, 57(3): 247-254.
[27] 余虹蛟, 文东辉, 孔凡志, 等. 基于复合结构抛光工具的铜衬底线性液动压抛光加工[J]. 中国机械工程, 2026, 37(3): 546-554.
YU H J, WEN D H, KONG F Z, et al.Linear Hydrodynamic Polishing of Copper Substrates Based on Composite Structure Polishing Tools[J]. China Mechanical Engineering, 2026, 37(3): 546-554.
[28] 计时鸣, 李琛, 谭大鹏, 等. 基于Preston方程的软性磨粒流加工特性[J]. 机械工程学报, 2011, 47(17): 156-163.
JI S M, LI C, TAN D P, et al.Study on Machinability of Softness Abrasive Flow Based on Preston Equation[J]. Journal of Mechanical Engineering, 2011, 47(17): 156-163.
[29] 淦作昆, 蔡姚杰, 许鑫祺, 等. 线性液动压抛光波纹度加工特性研究[J]. 表面技术, 2022, 51(6): 336-345.
GAN Z K, CAI Y J, XU X Q, et al.Processing Characteristics of Linear Hydrodynamic Polishing Waviness[J]. Surface Technology, 2022, 51(6): 336-345.
[30] ZHAN J M, MAO J H, LIU Q T. Study on Experiments of Nano-Abrasive Polishing in Hydrodynamic Suspension Liquid[J]. Applied Mechanics and Materials, 2010, 44/45/46/47: 446-450.
[31] PENG W Q, GUAN C L, LI S Y.Ultrasmooth Surface Polishing Based on the Hydrodynamic Effect[J]. Applied Optics, 2013, 52(25): 6411-6416.
[32] 郑子军, 薛凯元, 文东辉, 等. 线性液动压抛光加工的流体动压特性研究[J]. 中国机械工程, 2020, 31(8): 907-914.
ZHENG Z J, XUE K Y, WEN D H, et al.Study on Hydrodynamic Pressure Characteristics of Linear Hydrodynamic Pressure Polishing[J]. China Mechanical Engineering, 2020, 31(8): 907-914.
[33] HAMROCK B J, SCHMID S R, JACOBSON B O.Fundamentals of Fluid Film Lubrication[M]. Boca Raton: CRC Press, 2004.
[34] JIANG F, LI J F, YAN L, et al.Optimizing End-Milling Parameters for Surface Roughness under Different Cooling/Lubrication Conditions[J]. The International Journal of Advanced Manufacturing Technology, 2010, 51(9): 841-851.
[35] 孙建芳, 陈勇, 李吉, 等. 基于实验和CFD仿真模拟的化工风机叶轮失效机制研究[J]. 表面技术, 2025, 54(12): 114-123.
SUN J F, CHEN Y, LI J, et al.Failure Analysis of Chemical Industry Blower Impeller Based on Experiment and CFD Simulation[J]. Surface Technology, 2025, 54(12): 114-123.
[36] 计时鸣, 葛江勤, 高涛, 等. 基于CFD-DEM耦合的面约束软性磨粒流加工特性研究[J]. 机械工程学报, 2018, 54(5): 129-141.
JI S M, GE J Q, GAO T, et al.Study on Machinability of Surface-Constrained Softness Abrasive Flow Based on CFD-DEM Coupled Method[J]. Journal of Mechanical Engineering, 2018, 54(5): 129-141.

Funding

Natural Science Foundation of Zhejiang Province (LQ23E050003); National Natural Science Foundation of China (General Program 52475446, Overseas 2023); Anhui Provincial Natural Science Foundation (General Program 2308085ME170); Major Key Project of Anhui Provincial Science and Technology Innovation Action Plan (202423i08050035); Wenzhou Major Science and Technology Innovation Project (ZG2022029)
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