Performance of Polishing Tools Based on Leaf Vein-inspired Microstructure Design

JIN Qichao; LYU Lei; SANG Yang; YUAN Xiao; HEI Zhengqiang; WANG Jiawei; GUO Lei; LIU Xiaohui

doi:10.16490/j.cnki.issn.1001-3660.2026.01.002

PDF(23820 KB)

Surface Technology ›› 2026, Vol. 55 ›› Issue (1) : 13-27. DOI: 10.16490/j.cnki.issn.1001-3660.2026.01.002

Precision and Ultra-precision Machining

Performance of Polishing Tools Based on Leaf Vein-inspired Microstructure Design

JIN Qichao¹, LYU Lei^1,2, SANG Yang³, YUAN Xiao^1,2, HEI Zhengqiang¹, WANG Jiawei¹, GUO Lei^1,2, LIU Xiaohui^1,*

Author information +

History +

Abstract

During the polishing process by small tools, material removal primarily relies on the friction between the free abrasive particles in the polishing solution and the workpiece surface under the combined action of the polishing tool and the external load, thereby achieving the removal of the processed surface layer. However, when the polishing tool operates at high speed, the abrasive particles often fail to distribute uniformly across the processing area, leading to uneven particle distribution in different regions and consequently affecting polishing quality and material removal efficiency. Traditional polishing tool surface microstructure designs are often relatively simple and unable to effectively address the issue of uneven abrasive particle distribution in the processing area, particularly at high speed, so this phenomenon becomes more pronounced. The work aims to employ biomimetic design to innovate the microstructure of polishing tools, so as to address the uneven distribution of abrasive particles during the polishing process and thereby enhance the surface processing quality of optical glass. Inspired by the material transport system of plant leaves, an iterative function system (IFS) was used to construct a biomimetic microstructure model of lotus leaf veins, which was then applied to the surface microstructure design of polyurethane polishing pads. The branching structure of lotus leaf veins exhibited unique self-similarity, with branch angles and lengths naturally optimized to minimize flow resistance and achieve efficient material transport. This structural characteristic was incorporated into the polishing tool design to enhance polishing uniformity by optimizing abrasive particle distribution. To validate the impact of lotus leaf vein-inspired microstructures on abrasive particle distribution in polishing solutions, computational fluid dynamics (CFD) methods were applied to compare and analyze the abrasive particle distribution behavior of four polishing tools with different microstructures in polishing solutions. Additionally, based on factors such as microstructure morphology, effective abrasive particle count, abrasive particle contact force, and abrasive particle movement trajectories, a material removal theoretical model was established and a fixed-point polishing contour was simulated through Matlab programming. The effects of three process parameters including normal load, spindle speed, and abrasive concentration on material removal depth were explored. To validate the accuracy of the theoretical model, K9 glass localized polishing experiments were conducted with three sets of different process parameters. Simulation results indicated that lotus leaf vein-inspired microstructures achieved slurry saturation concentration faster than other microstructures within a shorter timeframe and exhibited more uniform abrasive particle distribution within the processing area, significantly enhancing abrasive particle concentration and stability during the processing. The results of the material removal model analysis indicated that spindle speed had the greatest impact on material removal depth, followed by normal load, while abrasive concentration had the least impact on removal depth. Experimental results showed that lotus leaf vein-inspired microstructures not only effectively improved the uniformity of abrasive distribution but also significantly enhanced material removal efficiency. A comparison of simulation results with experimental data showed that the error range between theoretical predictions and measured data was between 5.9% and 11.2%, and surface roughness was significantly improved in experiments, with the optimal condition achieving a surface roughness of (0.052±0.004) μm. In summary, the lotus leaf vein-inspired microstructure not only effectively improves the distribution and transport properties of abrasive particles in the polishing solution but also significantly enhances polishing uniformity and surface quality. Additionally, the established material removal model demonstrates excellent predictive capability.

Key words

small tool polishing / biomimetic structure / lotus leaf veins / abrasive particle distribution / material removal mechanism / polishing tool

Cite this article

EndNote

Ris (Procite)

Bibtex

Download Citations

JIN Qichao, LYU Lei, SANG Yang, YUAN Xiao, HEI Zhengqiang, WANG Jiawei, GUO Lei, LIU Xiaohui. Performance of Polishing Tools Based on Leaf Vein-inspired Microstructure Design[J]. Surface Technology. 2026, 55(1): 13-27

References

[1] HAN Y J, ZHANG H Y, YU M H, et al.Simulation Model Optimization for Bonnet Polishing Considering Consistent Contact Area Response[J]. Frontiers of Mechanical Engineering, 2024, 19(4): 27.
[2] ZHU W L, PAKENHAM-WALSH O, COPSON K, et al.Mechanism of Mid-Spatial-Frequency Waviness Removal by Viscoelastic Polishing Tool[J]. CIRP Annals, 2022, 71(1): 269-272.
[3] XU C, SONG J T, LIU X H, et al.Precision and Ultra- Precision Machining with Elastic Polishing Tools: A Review[J]. Surface Science and Technology, 2025, 3(1): 9.
[4] GUO L, SONG J T, XU C, et al.Retention and Interfacial Failure Mechanism of Single Diamond Grains in Resin- Bonded Grinding Tools[J]. Diamond and Related Materials, 2024, 150: 111681.
[5] YAMAZAKI T, YAMAMOTO T, KATAOKA M, et al.Effect of Various Groove Patterns on Slurry Flow in Polishing Pads[J]. Journal of the Japan Society for Abrasive Technology, 2012, 56(6): 388-393.
[6] IRFAN H M, LEE C Y, MAZUMDAR D, et al.Improvement of Material Removal Rate and within Wafer Non-Uniformity in Chemical Mechanical Polishing Using Computational Fluid Dynamic Modeling[J]. Journal of Manufacturing and Materials Processing, 2025, 9(3): 95.
[7] 熊强, 蔡伟明, 路家斌, 等. 抛光垫表面微细结构对抛光性能的影响试验[J]. 中国表面工程, 2023, 36(2): 200-211.
XIONG Q, CAI W M, LU J B, et al.Experiment on the Effect of Polishing Pad Surface Microstructure on Polishing Performance[J]. China Surface Engineering, 2023, 36(2): 200-211.
[8] SADRI MOFAKHAM A, KIM H, CHO H, et al.Enhancing CMP Performance of Micro-Structured Pad Patterns: CFD Simulations and Experimental Evaluations[J]. ECS Journal of Solid State Science and Technology, 2024, 13(11): 114006.
[9] ROSALES-YEOMANS D, DENARDIS D, BORUCKI L, et al.Design and Evaluation of Pad Grooves for Copper CMP[J]. Journal of the Electrochemical Society, 2008, 155(10): H797.
[10] YAMAZAKI T, DOI T K, UNEDA M, et al. Effect of Groove Pattern of Chemical Mechanical Polishing Pad on Slurry Flow Behavior[J]. Japanese Journal of Applied Physics, 2012, 51(5S): 05EF03.
[11] SONG J T, HUI J Z, GUO L, et al.Bio-Inspired Involute Groove Pad Textures for Enhanced Material Removal and Surface Quality in SiC Chemical Mechanical Polishing[J]. Journal of Materials Research and Technology, 2025, 39: 739-751.
[12] ZHU T Y, JIN M S, DONG X X, et al.Design of a Novel Fixed Abrasive Petal-Shaped Lapping Tool and Material Removal Uniformity Experiments on K9 Glass[J]. Journal of Manufacturing Processes, 2023, 90: 204-215.
[13] LU Y S, WANG J, LIU Y M, et al.Development of a Novel Polishing Pad with a Phyllotactic Pattern, and Experimental Studies[J]. Journal of Electronic Materials, 2014, 43(7): 2738-2746.
[14] 宋沛鸿, 郭磊, 刘天罡, 等. 基于反刍类动物臼齿仿生的平面磨具形貌结构设计与性能研究[J]. 表面技术, 2024, 53(2): 140-149.
SONG P H, GUO L, LIU T G, et al.Ruminant Molar- Inspired Design and Performance Study of Textured Abrasive Lapping Tool[J]. Surface Technology, 2024, 53(2): 140-149.
[15] MENG F W, YU T B, WIERCIGROCH M, et al.Profile Prediction for Ultrasonic Vibration Polishing of Alumina Ceramics[J]. International Journal of Mechanical Sciences, 2023, 252: 108360.
[16] IHARA M, MATSUBARA A, BEAUCAMP A.Study on Removal Mechanism at the Tool Rotational Center in Bonnet Polishing of Glass[J]. Wear, 2020, 454: 203321.
[17] 姜向敏. 子孔径中心供液光学表面加工工艺关键技术研究[D]. 天津: 天津大学, 2021.
JIANG X M.Research on Key Technology of Optical Surface Machining with Liquid Supply in Sub-Aperture Center[D]. Tianjin: Tianjin University, 2021.
[18] CHEN Z L, XIAO B, WANG B.Optimum and Arrangement Technology of Abrasive Topography for Brazed Diamond Grinding Disc[J]. International Journal of Refractory Metals and Hard Materials, 2021, 95: 105455.
[19] SUN Z, CUI T C, ZHU Y C, et al.The Mechanical Principles Behind the Golden Ratio Distribution of Veins in Plant Leaves[J]. Scientific Reports, 2018, 8: 13859.
[20] MATOS I S, BOAKYE M, NIEWIADOMSKI I, et al.Leaf Venation Network Architecture Coordinates Functional Trade-Offs across Vein Spatial Scales: Evidence for Multiple Alternative Designs[J]. The New Phytologist, 2024, 244(2): 407-425.
[21] PATINO-RAMIREZ F, ARSON C.Transportation Networks Inspired by Leaf Venation Algorithms[J]. Bioinspiration & Biomimetics, 2020, 15(3): 036012.
[22] SACK L, SCOFFONI C.Leaf Venation: Structure, Function, Development, Evolution, Ecology and Applications in the Past, Present and Future[J]. The New Phytologist, 2013, 198(4): 983-1000.
[23] ROTH-NEBELSICK A, UHL D, MOSBRUGGER V, et al.Evolution and Function of Leaf Venation Architecture: A Review[J]. Annals of Botany, 2001, 87(5): 553-566.
[24] LI Y X, XUE K.Mechanics in Leaf Venation Morphogenesis and Their Biomimetic Inspiration to Construct a 2-Dimensional Reinforcement Layout Model[J]. Journal of Biomimetics, Biomaterials and Tissue Engineering, 2011, 10: 81-93.
[25] VOGEL S.Contributions to the Functional Anatomy and Biology of Nelumbo Nucifera (Nelumbonaceae) II. Unique Emergent Druses on the Floral Receptacle[J]. Plant Systematics and Evolution, 2004, 249(1/2): 27-35.
[26] LIU L L, LI L H, GUO C, et al.The Design of a Biomimetic Hierarchical Thin-Walled Structure Inspired by a Lotus Leaf and Its Mechanical Performance Analysis[J]. Materials, 2023, 16(11): 4116.
[27] 李娜, 王琰. 基于IFS的荷叶叶脉纹理算法[J]. 沈阳理工大学学报, 2008, 27(6): 21-24.
LI N, WANG Y.The Algorithm for Lotus Leaf Vein Pattern Based on IFS[J]. Transactions of Shenyang Ligong University, 2008, 27(6): 21-24.
[28] CHO Y, LIU P Z, JEON S, et al.Simulation and Experimental Investigation of the Radial Groove Effect on Slurry Flow in Oxide Chemical Mechanical Polishing[J]. Applied Sciences, 2022, 12(9): 4339.
[29] HONG S, BAE S, CHOI S, et al.A Numerical Study on Slurry Flow with CMP Pad Grooves[J]. Microelectronic Engineering, 2020, 234: 111437.
[30] 罗晨阳, 郭磊, 曹雏清, 等. 固结与游离磨粒协同作用硬脆材料磨抛加工机理[J]. 中国机械工程, 2025, 36(6): 1159-1169.
LUO C Y, GUO L, CAO C Q, et al.Grinding and Polishing Mechanism of Hard and Brittle Materials under Cooperation of Fixed and Free Abrasive Grains[J]. China Mechanical Engineering, 2025, 36(6): 1159-1169.
[31] LUO J F, DORNFELD D A.Material Removal Mechanism in Chemical Mechanical Polishing: Theory and Modeling[J]. IEEE Transactions on Semiconductor Manufacturing, 2001, 14(2): 112-133.
[32] WANG Z, WANG Z X, LIANG Y D, et al.Modelling of Polyurethane Polishing Pad Surface Topography and Fixed-Point Polished Surface Profile[J]. Tribology International, 2024, 195: 109646.

Funding

The National Natural Science Foundation of China (51805044); China Postdoctoral Science Foundation (2024M762450); Basic Research Plan of Natural Science of Shaanxi (2025JC-YBMS-389)