Progresses and Perspectives in Laser Fabrication of Anti-reflection Microstructures

CHANG Zhixuan; SONG Ziyan; LIU Zhao; CHEN Guotai; LI Daizhou; ZHANG Hongjun; ZHONG Minlin; FAN Peixun

doi:10.16490/j.cnki.issn.1001-3660.2025.24.001

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Surface Technology ›› 2025, Vol. 54 ›› Issue (24) : 1-26. DOI: 10.16490/j.cnki.issn.1001-3660.2025.24.001

Special Topic—Ultrafast Laser Surface Processing

Progresses and Perspectives in Laser Fabrication of Anti-reflection Microstructures

CHANG Zhixuan, SONG Ziyan, LIU Zhao, CHEN Guotai, LI Daizhou, ZHANG Hongjun, ZHONG Minlin, FAN Peixun^*

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Abstract

Anti-reflection micro/nano structures (ARMs) represent a rapidly advancing class of structural optical interfaces that suppress surface reflection and regulate light-matter interactions through tailored geometrical features rather than conventional refractive-index-matched thin-film coatings. By introducing micro- and nanoscale textures onto material surfaces, ARMs can effectively manipulate the spatial distribution, propagation pathways, and local density of optical fields, thereby achieving broadband low reflectance together with enhanced absorption or transmission. Owing to their coating-free and monolithic nature, ARMs also exhibit intrinsic advantages in mechanical robustness, thermal endurance, and environmental stability, which is critical for practical deployment in complex or extreme operating conditions. As a result, ARMs have become enabling technologies in optoelectronic devices, infrared optical components, and emerging energy-related systems.
This review provides a systematic and comprehensive overview of the fundamental principles, material systems, and laser-based fabrication strategies of ARMs, with particular emphasis on the multiscale structural synergy and multiphysical coupling mechanisms that govern their broadband, wide-angle, and environmentally stable optical responses. The discussion begins with an in-depth analysis of the optical mechanisms underlying anti-reflection and light absorption in structured surfaces. Subwavelength nanostructures give rise to effective-medium and graded-index effects, which gradually bridges the refractive-index mismatch between air and the substrate, thereby suppressing Fresnel reflection over a wide spectral range. Microscale features, such as tapered cavities, cones, or grooves, further enhance optical performance by introducing geometric light trapping and multiple internal reflections. When these structural levels are hierarchically combined, ARMs exhibit synergistic effects that enable smooth spectral responses across ultraviolet, visible, and infrared bands, while maintaining low sensitivity to polarization and incidence angle.
Beyond purely geometric optics, resonance-based mechanisms play an essential role in many ARM systems. Localized and propagating surface plasmons in metals, phonon polaritons in polar dielectrics, and optical cavity modes in structured semiconductors can strongly confine electromagnetic fields at the surface. The coupling between these resonances and multiscale geometric light trapping leads to enhanced absorption bandwidths and tunable spectral selectivity. Importantly, the coexistence of ordered and disordered features allows ARMs to balance broadband performance with resonance enhancement, overcoming the intrinsic bandwidth limitations of purely periodic structures.
The review further categorizes ARMs according to representative material platforms, including semiconductors, metals and alloys, oxides and ceramics, and infrared-transparent materials. Each material class presents distinct opportunities and constraints arising from its intrinsic optical constants, thermal conductivity, chemical stability, and laser-matter interaction behavior. By correlating material properties with achievable structural morphologies and optical responses, this work highlights the universality of ARM design principles while clarifying material-specific optimization strategies for different spectral regions and application scenarios.
Laser fabrication is emphasized as a particularly powerful and versatile approach for ARM realization. Ultrafast laser processing enables precise control of energy deposition, nonequilibrium phase transitions, and self-organized structure formation across multiple length scales. Techniques such as direct laser writing, laser-induced periodic surface structures, hybrid laser-chemical etching, and programmable scanning strategies allow ARMs to be fabricated on diverse substrates with high spatial flexibility and scalability.
In addition to optical performance, the multifunctionality of laser-structured ARMs is critically reviewed. Surface texturing can simultaneously impart superhydrophobicity, anti-icing, corrosion resistance, and enhanced heat dissipation, enabling multifunctional integration at a single interface. The performance of ARMs under extreme environments, including high temperatures, high humidity, sand erosion, and high-power laser irradiation, is discussed to demonstrate their superior durability relative to traditional thin-film antireflection coatings. These attributes make ARMs particularly suitable for demanding applications such as infrared windows, high-power laser optics, and energy harvesting systems operating under harsh conditions.
Finally, future research directions are outlined, focusing on intelligent light-field modulation and designable fabrication of ARMs. Emerging trends include data-driven and inverse-design methodologies, integration of multifunctional responses beyond optics, and scalable manufacturing strategies for real-world deployment. By bridging fundamental optical physics with advanced fabrication and engineering considerations, this review aims to provide a comprehensive reference and design framework for the development and application of next-generation structured anti-reflection surfaces.

Key words

laser processing / femtosecond laser / micro/nano structures / anti-reflection

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CHANG Zhixuan, SONG Ziyan, LIU Zhao, CHEN Guotai, LI Daizhou, ZHANG Hongjun, ZHONG Minlin, FAN Peixun. Progresses and Perspectives in Laser Fabrication of Anti-reflection Microstructures[J]. Surface Technology. 2025, 54(24): 1-26

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Funding

National Natural Science Foundation of China (52475471, 523B2050, 51575309, 51210009); National Key Research and Development Program of China (2023YFB4603600, 2017YFB1104300)