Multi-physical Field Regulation for Atoms of In-situ Mechanical Electron Microscopy

ZHAO Tiqing; LI Yinong; LIAN Yiling; ZHU Qi; LI Jiayi; LU Yang

doi:10.16490/j.cnki.issn.1001-3660.2025.23.005

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Surface Technology ›› 2025, Vol. 54 ›› Issue (23) : 78-91. DOI: 10.16490/j.cnki.issn.1001-3660.2025.23.005

Special Topic—Atomic-level manufacturing

Multi-physical Field Regulation for Atoms of In-situ Mechanical Electron Microscopy

ZHAO Tiqing^1,2, LI Yinong^1,2, LIAN Yiling¹, ZHU Qi¹, LI Jiayi^1,2, LU Yang^1,2,*

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Abstract

Atomic manufacturing relies critically on precisely controlling the forms and properties of matters at the atomic scale. In-situ transmission electron microscopy (TEM) is a powerful platform for atom manufacturing and observation because of its high temporal and spatial resolution, which can be coupled with multiple physical fields. TEM can provide the structure and composition information of samples from the atomic resolution, but its application is often limited to solid samples with a thickness of less than 100 nm. At the same time, the observation of the structure information of solid materials in a vacuum environment is far from meeting the needs of researchers. With the rapid development of information technology and nanofabrication technology, many in-situ electron microscopy characterization methods emerge.
This paper provides a detailed review of atomic manipulation of physical fields including force, electricity, heat, light and magnetism based on in-situ electron microscopy. Besides, it also discusses the change mechanism of materials in a specific atmosphere or solution environment, multiple physical fields are often combined with each other to achieve atomic scale observation and manufacturing under a variety of environments. Firstly, it introduces the precise control methods by precisely controlling the magnitude and direction of the force field of the transmission electron microscope to assist atomic diffusion. Inside transmission electron microscopy, the size and direction of the force field are precisely controlled, and the force is directly applied to the target material, which can realize the auxiliary atomic diffusion and directional accurate manipulation of atoms, such as atomic cold welding, nano-cutting and phase transformation. Not only a single force field can be controlled and applied, but also MEMS (micro electro mechanical system) technology can be used to achieve electro mechanical coupling and thermal mechanical coupling, so as to realize multi-physical field directional atomic manipulation and atomic control. Secondly, the technology of indirectly inducing the diffusion and reconstruction of atoms by driving other physical fields such as electricity, heat, light and magnetism is expounded. Electric, thermal, optical and magnetic drives can indirectly induce atomic diffusion and rearrangement, such as thermal field driven atomic diffusion, material phase transformation, electric field driven atomic deposition, atomic etching and atomic orientation arrangement, apart from these physical fields, studies in the liquid phase, gas phase and vacuum environment prove that the electron beam is also an important factor in the experiment, and reasonable control of the electron beam and its dose helps to achieve accurate manipulation of atoms. Finally, it discusses the development of atomic manipulation techniques in complex environments because of the introduction of micro-electromechanical systems and advances in instrument technology, atomic motion and manipulation can be achieved in the complex multi-field environment such as low vacuum, gas phase, and even liquid phase, atomic manipulation of interface in gas phase reaction, directional growth of atoms and atomic etching during liquid phase reaction are introduced.
In-situ electron microscopy, as a means of mechanism research, still has a certain distance from large-scale atomic-level manufacturing, however, it achieves nano and micrometer-level additive manufacturing of materials at the atomic scale, providing a mechanism and a theoretical basis for larger-scale atomic manufacturing. Specifically, in-situ transmission electron microscopy, as an atomic characterization platform and field regulation platform, opens up a broader atomic regulation space by combining various environments and physical fields. The manufacturing of nanometer and micron scale structures is realized through atomic scale control, which provides a theoretical and experimental basis for subsequent large-scale atomic manufacturing, and will become an important tool to promote multi-energy field-assisted atomic manufacturing.

Key words

in-situ transmission electron microscopy / atomic resolution / multiple physical fields / atomic manufacturing / atomic manipulation

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ZHAO Tiqing, LI Yinong, LIAN Yiling, ZHU Qi, LI Jiayi, LU Yang. Multi-physical Field Regulation for Atoms of In-situ Mechanical Electron Microscopy[J]. Surface Technology. 2025, 54(23): 78-91 https://doi.org/10.16490/j.cnki.issn.1001-3660.2025.23.005

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