HER Properties of MoS2 Coatings with Different Thicknesses Prepared by Magnetron Sputtering

ZHANG Kejia, YAO Mingjing, HUAN Huan, ZHANG Hong, WANG Wenqian, TANG Guoqing, JIN Fanya

Surface Technology ›› 2025, Vol. 54 ›› Issue (22) : 170-177.

PDF(2358 KB)
PDF(2358 KB)
Surface Technology ›› 2025, Vol. 54 ›› Issue (22) : 170-177. DOI: 10.16490/j.cnki.issn.1001-3660.2025.22.016
Surface Functionalization

HER Properties of MoS2 Coatings with Different Thicknesses Prepared by Magnetron Sputtering

  • ZHANG Kejia1, YAO Mingjing1,2, HUAN Huan1, ZHANG Hong1, WANG Wenqian1, TANG Guoqing1, JIN Fanya1*
Author information +
History +

Abstract

The development of noble-metal-free catalysts with high catalytic efficiency and low cost can greatly reduce the cost of hydrogen production in electrolytic water hydrogen production technology. In recent years, molybdenum disulfide (MoS2) has been widely used in hydrogen evolution, and the catalytic activity of MoS2 thin film is closely related to its thickness. This study presents an innovative investigation into the hydrogen evolution reaction (HER) performance of MoS2 coatings with precisely controlled thicknesses which are deposited on nickel foam (NF) substrates. The physical vapor deposition technique, a significant advancement over conventional methods like hydrothermal synthesis or chemical vapor deposition lack of reproducibility and scalability, was utilized. The effect of thickness, a key parameter, on the structural characteristics and electrochemical performance of MoS2 was explored. Four distinct thicknesses of 0.5 μm, 3.8 μm, 5.5 μm, and 11.4 μm were obtained by varying the deposition time while keeping other sputtering parameters constant, allowing for a direct correlation between coating thickness, microstructure, phase composition, and HER activity.
Structural analysis via XRD revealed that all coatings were largely amorphous but exhibited discernible diffraction peaks. Crucially, the (100) peak, indicative of a vertical growth orientation which exposed more active edge sites, became more pronounced with the increasing thickness, particularly in the 5.5 μm sample. Raman spectroscopy and TEM imaging provided a key finding: a phase transition from the semiconducting 2H-MoS2 phase (in the 0.5 and 3.8 μm samples) to a metallic 1T-MoS2 phase (in the 5.5 and 11.4 μm samples) on the coating surface. This transition, likely induced by interlayer sliding from plasma bombardment during sputtering, was critical as the 1T-phase offered superior electrical conductivity. SEM imaging showed that the morphology evolved from small clusters to a typical, porous "worm-like" structure at moderate thicknesses (3.8 and 5.5 μm), which then fractured and became more compact upon excessive thickening (11.4 μm) due to stacking compression and resputtering effects.
Electrochemical performance metrics demonstrated a non-linear relationship between thickness and HER activity, identifying a clear performance optimum. The 5.5 μm coating delivered exceptional HER performance, exhibiting the lowest overpotentials of 138.2 mV and 218.2 mV at current densities of 10 mA/cm2 and 100 mA/cm2, respectively, and the smallest Tafel slope of 76.5 mV/dec, indicating favorable reaction kinetics. This sample also had the lowest charge transfer resistance (Rct = 0.028 Ω), as determined by EIS, facilitating efficient electron transport. Although the thickest sample (11.4 μm) possessed the largest electrochemical active surface area (Cdl = 97.9 mF/cm2) and a metallic surface phase, its HER performance degraded due to a significant increase in Rct (0.1 Ω), caused by excessive electron transport distance and compact stacking.
The thickness-dependent behavior is analyzed from the perspective of three core HER steps (Volmer, electron transfer and desorption). An optimal thickness (~5.5 μm) provides an ideal balance: a porous, vertically-aligned morphology with abundant edge sites for efficient H* adsorption, a metallic 1T-phase surface for optimal adsorption energy, and a moderate thickness ensuring low-resistance electron pathways from the substrate. Conversely, overly thick coatings hinder electrolyte penetration, trap H2 bubbles, and increase internal resistance, disrupting the adsorption-desorption balance and impairing performance. This work provides profound new insights into the role of coating thickness in electrocatalyst design, establishing magnetron-sputtered MoS2 as a highly promising and tunable non-precious metal catalyst for sustainable hydrogen production.

Key words

electrolytic water hydrogen production / 1T-MoS2 / hydrogen evolution reaction / coating thickness

Cite this article

Download Citations
ZHANG Kejia, YAO Mingjing, HUAN Huan, ZHANG Hong, WANG Wenqian, TANG Guoqing, JIN Fanya. HER Properties of MoS2 Coatings with Different Thicknesses Prepared by Magnetron Sputtering[J]. Surface Technology. 2025, 54(22): 170-177 https://doi.org/10.16490/j.cnki.issn.1001-3660.2025.22.016

References

[1] ABE J O, POPOOLA A P I, AJENIFUJA E, et al. Hydrogen Energy, Economy and Storage: Review and Recommendation[J]. International Journal of Hydrogen Energy, 2019, 44(29): 15072-15086.
[2] TEE S Y, WIN K Y, TEO W S, et al.Recent Progress in Energy-Driven Water Splitting[J]. Advanced Science, 2017, 4(5): 1600337.
[3] ZHOU W J, JIA J, LU J, et al.Recent Developments of Carbon-Based Electrocatalysts for Hydrogen Evolution Reaction[J]. Nano Energy, 2016, 28: 29-43.
[4] LIU Z Z, SHANG X, DONG B, et al.Triple Ni-Co-Mo Metal Sulfides with One-Dimensional and Hierarchical Nanostructures towards Highly Efficient Hydrogen Evolution Reaction[J]. Journal of Catalysis, 2018, 361: 204-213.
[5] FANG S, ZHU X R, LIU X K, et al.Uncovering Near-Free Platinum Single-Atom Dynamics during Electrochemical Hydrogen Evolution Reaction[J]. Nature Communications, 2020, 11: 1029.
[6] CHO J, LIM T, KIM H, et al.Importance of Broken Geometric Symmetry of Single-Atom Pt Sites for Efficient Electrocatalysis[J]. Nature Communications, 2023, 14: 3233.
[7] 彭文屹, 朱峰, 邓晓华, 等. 电沉积工艺参数对镍-钼-锌三元合金电极析氢催化性能的影响[J]. 表面技术, 2020, 49(1): 173-179.
PENG W Y, ZHU F, DENG X H, et al.Effect of Electrodeposition Process Parameters on Catalytic Performance of Ni-Mo-Zn Ternary Alloy Electrode for Hydrogen Evolution[J]. Surface Technology, 2020, 49(1): 173-179.
[8] XU B Y, ZHANG Y, PI Y C, et al.Research Progress of Nickel-Based Metal-Organic Frameworks and Their Derivatives for Oxygen Evolution Catalysis[J]. Acta Physico Chimica Sinica, 2021, 37(7): 2009074.
[9] LIU Y R, DU Y M, GAO W K, et al.Surface Phosphorsulfurization of NiCo2O4 Nanoneedles Supported on Carbon Cloth with Enhanced Electrocatalytic Activity for Hydrogen Evolution[J]. Electrochimica Acta, 2018, 290: 339-346.
[10] 王奥琦, 陈军, 张鹏飞, 等. NiMo(O)物相结构与电解水析氢反应活性的关联[J]. 物理化学学报, 2023, 39(4): 77-86.
WANG A Q, CHEN J, ZHANG P F, et al.Relation between NiMo(O) Phase Structures and Hydrogen Evolution Activities of Water Electrolysis[J]. Acta Physico-Chimica Sinica, 2023, 39(4): 77-86.
[11] XU X X, LIU L.MoS2 with Controlled Thickness for Electrocatalytic Hydrogen Evolution[J]. Nanoscale Research Letters, 2021, 16(1): 137.
[12] SHANG X, HU W H, LI X, et al.Oriented Stacking along Vertical (002) Planes of MoS2: A Novel Assembling Style to Enhance Activity for Hydrogen Evolution[J]. Electrochimica Acta, 2017, 224: 25-31.
[13] QIN R, WANG P Y, LIN C, et al.Transition Metal Nitrides: Activity Origin, Synthesis and Electrocatalytic Applications[J]. Acta Physico Chimica Sinica, 2021, 37(7): 2009099.
[14] WEI C, RAO R R, PENG J Y, et al.Recommended Practices and Benchmark Activity for Hydrogen and Oxygen Electrocatalysis in Water Splitting and Fuel Cells[J]. Advanced Materials, 2019, 31(31): 1806296.
[15] 姚明镜, 张珂嘉, 张虹, 等. 溅射功率对MoS2涂层结构及其电催化性能影响[J]. 真空科学与技术学报, 2024, 44(12): 1084-1090.
YAO M J, ZHANG K J, ZHANG H, et al.Effect of Sputtering Power on the Structure and Electrocatalytic Performance of MoS2 Coating[J]. Chinese Journal of Vacuum Science and Technology, 2024, 44(12): 1084-1090.
[16] TANG Q, JIANG D E.Mechanism of Hydrogen Evolution Reaction on 1T-MoS2 from First Principles[J]. ACS Catalysis, 2016, 6(8): 4953-4961.
[17] AMBROSI A, CHIA X, SOFER Z, et al.Enhancement of Electrochemical and Catalytic Properties of MoS2 through Ball-Milling[J]. Electrochemistry Communications, 2015, 54: 36-40.
[18] LUKOWSKI M A, DANIEL A S, MENG F, et al.Enhanced Hydrogen Evolution Catalysis from Chemically Exfoliated Metallic MoS2 Nanosheets[J]. Journal of the American Chemical Society, 2013, 135(28): 10274-10277.
[19] TANG J, HUANG J Z, DING D J, et al.Research Progress of 1T-MoS2 in Electrocatalytic Hydrogen Evolution[J]. International Journal of Hydrogen Energy, 2022, 47(94): 39771-39795.
[20] HUANG Y C, SUN Y H, ZHENG X L, et al.Atomically Engineering Activation Sites Onto Metallic 1T-MoS2 Catalysts for Enhanced Electrochemical Hydrogen Evolution[J]. Nature Communications, 2019, 10: 982.
[21] LIU Q, FANG Q, CHU W S, et al.Electron-Doped 1T-MoS2 via Interface Engineering for Enhanced Electrocatalytic Hydrogen Evolution[J]. Chemistry of Materials, 2017, 29(11): 4738-4744.
[22] ARDAHE M, HANTEHZADEH M R, GHORANNEVISS M.Effect of Growth Temperature on Physical Properties of MoS2 Thin Films Synthesized by CVD[J]. Journal of Electronic Materials, 2020, 49(2): 1002-1008.
[23] WANG P Y, WANG X, TAN F Y, et al.Residual Oxygen Effects on the Properties of MoS2 Thin Films Deposited at Different Temperatures by Magnetron Sputtering[J]. Crystals, 2021, 11(10): 1183.
[24] GHOLAMVAND Z, MCATEER D, HARVEY A, et al.Electrochemical Applications of Two-Dimensional Nanosheets: The Effect of Nanosheet Length and Thickness[J]. Chemistry of Materials, 2016, 28(8): 2641-2651.
[25] 梁成浩, 贾理男, 黄乃宝, 等. 涂覆厚度对Ru-Ir-Ti氧化物阳极涂层电化学性能的影响[J]. 稀有金属材料与工程, 2013, 42(3): 611-615.
LIANG C H, JIA L N, HUANG N B, et al.Effect of Painting Thickness on the Electrochemical Characteristics of Ru-Ir-Ti Oxide Anodic Coating[J]. Rare Metal Materials and Engineering, 2013, 42(3): 611-615.
[26] KOUTSODONTIS C, KATSAOUNIS A, FIGUEROA J C, et al.The Effect of Catalyst Film Thickness on the Magnitude of the Electrochemical Promotion of Catalytic Reactions[J]. Topics in Catalysis, 2006, 38(1): 157-167.
[27] HU W H, HAN G Q, DAI F N, et al.Effect of pH on the Growth of MoS2 (002) Plane and Electrocatalytic Activity for HER[J]. International Journal of Hydrogen Energy, 2016, 41(1): 294-299.
[28] LIN Y C, DUMCENCO D O, HUANG Y S, et al.Atomic Mechanism of the Semiconducting-to-Metallic Phase Transition in Single-Layered MoS2[J]. Nature Nanotechnology, 2014, 9(5): 391-396.
[29] ZHU J Q, WANG Z C, YU H, et al.Argon Plasma Induced Phase Transition in Monolayer MoS2[J]. Journal of the American Chemical Society, 2017, 139(30): 10216-10219.
[30] WANG S, ZHANG D, LI B, et al.Ultrastable In-Plane 1T-2H MoS2 Heterostructures for Enhanced Hydrogen Evolution Reaction[J]. Advanced Energy Materials, 2018, 8(25): 1801345.
[31] SUN Y, ZANG Y P, TIAN W Z, et al.Plasma-Induced Large-Area N, PT-Doping and Phase Engineering of MoS2 Nanosheets for Alkaline Hydrogen Evolution[J]. Energy & Environmental Science, 2022, 15(3): 1201-1210.
[32] ZHAO L Y, WANG Y S, WEN G W, et al.Ammonium-Driven Modulation of 1T-MoS2 Structure and Composite with Graphene: A Pathway to High-Performance Lithium-Ion Battery Anodes[J]. Journal of Colloid and Interface Science, 2025, 680: 151-161.
[33] INOCÊNCIO C V M, HOLADE Y, MORAIS C, et al. Electrochemical Hydrogen Generation Technology: Challenges in Electrodes Materials for a Sustainable Energy[J]. Electrochemical Science Advances, 2023, 3(3): e2100206.
[34] JAYABAL S, WU J, CHEN J Y, et al.Metallic 1T-MoS2 Nanosheets and Their Composite Materials: Preparation, Properties and Emerging Applications[J]. Materials Today Energy, 2018, 10: 264-279.
[35] KONG D S, WANG H T, CHA J J, et al.Synthesis of MoS2 and MoSe2 Films with Vertically Aligned Layers[J]. Nano Letters, 2013, 13(3): 1341-1347.

Funding

The SWIP Innovation Action Program (202301XWCX003);The Project of Leshan Science and Technology Bureau (23GZD014)
PDF(2358 KB)

Accesses

Citation

Detail

Sections
Recommended

/