Effect of pH on Nano-tribochemical Behavior in ChemicalMechanical Polishing of Aluminum Alloy

ZHU Yuguang; WANG Zirui; MA Fuhui; MEI Lu; WANG Zhengyi; WANG Yongguang

doi:10.16490/j.cnki.issn.1001-3660.2025.02.014

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Surface Technology ›› 2025, Vol. 54 ›› Issue (2) : 173-181, 221. DOI: 10.16490/j.cnki.issn.1001-3660.2025.02.014

Precision and Ultra-precision Machining

Effect of pH on Nano-tribochemical Behavior in ChemicalMechanical Polishing of Aluminum Alloy

ZHU Yuguang¹, MA Fuhui¹, MEI Lu¹, WANG Zhengyi¹, WANG Zirui², WANG Yongguang²

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Abstract

In order to investigate the nano-tribochemical behavior in chemical mechanical polishing (CMP) of aluminum alloy, characterize the thickness and mechanical properties of the surface film formed by the CMP solution, and analyze the contact state and tribochemical characteristics of single abrasive particle in CMP.

Key words

aluminum alloy; chemical mechanical polishing; nanotribology; pH value; attraction force; adhesion force

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ZHU Yuguang, WANG Zirui, MA Fuhui, MEI Lu, WANG Zhengyi, WANG Yongguang. Effect of pH on Nano-tribochemical Behavior in ChemicalMechanical Polishing of Aluminum Alloy[J]. Surface Technology. 2025, 54(2): 173-181, 221