Effect of Cr/CrxCy Gradient Transition Layer Prepared with HiPIMS on Properties of DLC Films

HUA Liqiang, SU Fenghua, LI Ji, LIN Songsheng

Surface Technology ›› 2025, Vol. 54 ›› Issue (1) : 62-73.

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PDF(10494 KB)
Surface Technology ›› 2025, Vol. 54 ›› Issue (1) : 62-73. DOI: 10.16490/j.cnki.issn.1001-3660.2025.01.006
Special Topic—PVD Hard Protective and Functional Coating with High Strength and Toughness

Effect of Cr/CrxCy Gradient Transition Layer Prepared with HiPIMS on Properties of DLC Films

  • HUA Liqiang1, SU Fenghua2, LI Ji3, LIN Songsheng4
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Abstract

Diamond-like carbon (DLC) film is an excellent solid lubricant with high hardness and low friction, but at the same time, the DLC film has the disadvantage of poor substrate bonding. In order to investigate the effect of Cr/CrxCy gradient transition layer prepared by HiPIMS on the properties of DLC films, and to prepare DLC films with excellent bond strength, friction and wear properties and corrosion resistance, DLC films with a Cr/CrxCy gradient transition layer were prepared on the surfaces of 304 stainless steel and YG6 tungsten carbide by high-power pulsed magnetron sputtering (HiPIMS) and direct current magnetron sputtering (DCMS). The effects of the Cr/CrxCy gradient layer on the structure and properties of the DLC films were investigated under different HiPIMS power sources. The cross-sectional morphology of the films was observed by SEM, the surface morphology and roughness of the films were analyzed by AFM, and the film-base bonding strength and friction and wear properties of the films were tested with an UMT-Tribolab friction and wear scratching experimental machine, and the scratching was observed and the bonding size was measured with an optical microscope to analyse the wear mechanism. The prepared DLC films were tested for corrosion resistance with an electrochemical workstation. The thickness of the Cr/CrxCy gradient transition layer increased with the increase of the HiPIMS power supply. The thickest was 200 nm, the surface roughness of the films decreased from 4.69 nm in the control group S1 to 1.15 nm in the S5 group. The nano-hardness of the films gradually increased from 18.76 GPa in S1 to 23.77 GPa in S5. The film-base bonding force of the films showed a tendency of decreasing and then increasing, and the maximum film-base bonding force of the samples in the S5 group was 22.19 N. The friction coefficient of the films increased with the HiPIMS power supply and the friction coefficient of the films increased with the increase in the HiPIMS power supply and the friction coefficient of the samples in the S5 group. The friction coefficient of the films decreased with the increase of HiPIMS power, and the lowest was 0.032 2 for the S5 group, which corresponded to the wear rate of the films of 4.2×10?7 mm3/(N.m). Electrochemical tests showed that the DLC films prepared when the HiPIMS power supply was 2.4 kW had the lowest corrosion current density, the highest interfacial charge transfer resistance, and the best corrosion resistance. Using high-power pulsed magnetron sputtering technology to prepare the Cr/CrxCy gradient transition layer of DLC films can effectively improve the surface quality of the film, improve the film base bonding force of the film, reduce the residual stress of the film, and at the same time reduce the friction coefficient of the film to improve the wear resistance of the film. Compared with DCMS, HiPIMS can make the transition layer of DLC more dense, reduce the porosity of the film, and improve the corrosion resistance of the film. The DLC films with a Cr/CrxCy gradient transition layer prepared by HiPIMS have a lower corrosion current density and higher interfacial charge transfer resistance to enhance the corrosion resistance.

Key words

HiPIMS; DLC films; tribological property; transition layer; abrasive resistance; decay resistance

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HUA Liqiang, SU Fenghua, LI Ji, LIN Songsheng. Effect of Cr/CrxCy Gradient Transition Layer Prepared with HiPIMS on Properties of DLC Films[J]. Surface Technology. 2025, 54(1): 62-73
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