Tribological Properties of Polishing Pads by Surface Texturing

ZHANG Xiaokang; SHI Chenchun; YE Wenbin; FANG Hao; LI Jinbang; YU Aibing

doi:10.16490/j.cnki.issn.1001-3660.2024.21.011

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Surface Technology ›› 2024, Vol. 53 ›› Issue (21) : 97-111. DOI: 10.16490/j.cnki.issn.1001-3660.2024.21.011

Friction, Wear and Lubrication

Tribological Properties of Polishing Pads by Surface Texturing

ZHANG Xiaokang¹, SHI Chenchun¹, YE Wenbin¹, LI Jinbang¹, YU Aibing¹, FANG Hao²

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Abstract

In order to improve the service life of the polishing pad and optimize the polishing efficiency of bonnet tool, the work aims to investigate the effect of surface texturing on the tribological property of the polishing pad, and study the material removal reinforcement behavior by the textured polishing pad thoroughly.

Key words

surface texturing; polishing pad; wear resistance; friction; material removal; abrasive particle

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ZHANG Xiaokang, SHI Chenchun, YE Wenbin, FANG Hao, LI Jinbang, YU Aibing. Tribological Properties of Polishing Pads by Surface Texturing[J]. Surface Technology. 2024, 53(21): 97-111