Fused quartz has excellent physical and chemical properties, and is widely used in manufacture of optical components and other industries and many fields of modern science and technology. However, fused quartz glass is a high hard and brittle material. Cracks, residual stress and other damage are likely to occur during processing. The surface residual stress layer of the workpiece after grinding is under the crack layer, its position is hidden and difficult to observe. During the use of the workpiece, it is easy to expand into cracks under the action of external load, which affects the design of subsequent process parameters and the service life of the workpiece. Therefore, researching on the depth of surface residual stress layer after grinding is helpful to determine the residual processing allowance and improve the working performance of the workpiece.