Effect of Sputtering Technology on Microstructure and Mechanical Properties of TiN Coatings

GU Jia-bin, LI Jian-yong, LI Liu-he, JIN Jie, ZHANG Hai-peng

Surface Technology ›› 2023, Vol. 52 ›› Issue (9) : 160-169, 188.

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PDF(8821 KB)
Surface Technology ›› 2023, Vol. 52 ›› Issue (9) : 160-169, 188. DOI: 10.16490/j.cnki.issn.1001-3660.2023.09.012

Effect of Sputtering Technology on Microstructure and Mechanical Properties of TiN Coatings

  • GU Jia-bin1, LI Jian-yong1, JIN Jie1, LI Liu-he2, ZHANG Hai-peng3
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Abstract

The microstructure properties of TiN coating are mainly affected by the deposition conditions, which in turn are affected by the sputtering technology. The proper use of the sputtering technology allows to control the state of ion bombardment during coating growth and tailors the crystal structure, thereby improving the properties of TiN coating. Therefore, TiN coatings were deposited on the M2 high-speed steel by different sputtering technologies (dcMS, HiPMS, and Hybrid) in this work. The effects of different sputtering technologies on the microstructure, mechanical properties, and high temperature wear properties of TiN coatings were investigated.

Key words

magnetron sputtering; Hybrid; TiN coating; microstructure; mechanical properties; high temperature wear property

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GU Jia-bin, LI Jian-yong, LI Liu-he, JIN Jie, ZHANG Hai-peng. Effect of Sputtering Technology on Microstructure and Mechanical Properties of TiN Coatings[J]. Surface Technology. 2023, 52(9): 160-169, 188
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