PDF(5250 KB)
Magnetic Field Simulation and Structure Design of Cylindrical Magnetron Sputtering Target
WANG Dong, CAI Chang-long, MI Qian, WANG Lin-bo, LIU Hua-chen, HOU Jie
Surface Technology ›› 2023, Vol. 52 ›› Issue (8) : 371-379.
PDF(5250 KB)
PDF(5250 KB)
Magnetic Field Simulation and Structure Design of Cylindrical Magnetron Sputtering Target
/
| 〈 |
|
〉 |