PDF(3188 KB)
Homogeneity of Single Crystal Diamond under Epitaxial Growth by MPCVD High Power
LI Ting-yang, LIU Fan, WENG Jun, ZHANG Qing, WANG Jian-hua, XIONG Li-wei, ZHAO Hong-yang
Surface Technology ›› 2023, Vol. 52 ›› Issue (5) : 278-287, 305.
PDF(3188 KB)
PDF(3188 KB)
Homogeneity of Single Crystal Diamond under Epitaxial Growth by MPCVD High Power
single crystal diamond; microwave plasma; chemical vapor deposition; high power; homogeneity
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