PDF(5028 KB)
The Results of Annealing Treatment of Hydrogenated Amorphous Carbon Film Is Affected by Its Intrinsic Structure
HUANG Min-bei, LAI Zhen-guo, ZHANG Bin, LONG Mei-biao, GAO Kai-xiong, ZHANG Jun-yan
Surface Technology ›› 2022, Vol. 51 ›› Issue (10) : 192-199.
PDF(5028 KB)
PDF(5028 KB)
The Results of Annealing Treatment of Hydrogenated Amorphous Carbon Film Is Affected by Its Intrinsic Structure
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