This paper aims to investigate the contribution of structure and mechanical properties to tribological properties and corrosion-wear behavior of TiAlSiN nano-films prepared by Filtered Cathodic Vacuum Arc Deposition. TiAlSiN films were deposited on the surface of 316L stainless steel substrate under the pressure of N2 at 6×10–2~15×10–2 Pa. The microstructure, composition and morphology of film were analyzed by SEM, XRD, XPS. The friction and wear behavior of the film in dry condition were tested by friction tester, also the open circuit potential change curve of the film in 3.5wt.% artificial seawater environment were recorded by electrochemical workstation. The profiler was used to test the contour curve of the wear and calculate the wear rate. The results show the TiAlSiN film has a typical composite structure of amorphous nanocrystals. The surface of the film is fine and smooth, and the cross section has no obvious columnar crystal structure. With the increase of air pressure, the grain size of the film decreases from 26 nm to 12 nm. In addition, the TiAlSiN film deposited under the air pressure of 0.08Pa exhibits the superior mechanical properties with nano-hardness at 22 GPa and basement membrane binding force at 28 N. The dry friction coefficient is 0.412 and wear rate is 0.5×10–6 mm3/(N.m); while in 3.5wt.% artificial seawater, the friction coefficient and wear rate change to 0.36 and 2.5×10–6 mm3/(N.m) due to the enhancement of wear rate caused by the interaction of corrosion and wear. The TiAlSiN nano-film prepared by the Filtered Cathodic Vacuum Arc Deposition shows good mechanical properties as well as friction and abrasion resistance, which boasts broad application prospects.