Effect of Nitrogen Surface Modification on Tribology and Corrosion Behavior of Amorphous Carbon Coating

LI Hao, ZHENG He, LI Shu-yu, GUO Peng, SUN Li-li, KE Pei-ling, WANG Ai-ying

Surface Technology ›› 2022, Vol. 51 ›› Issue (5) : 61-69.

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Surface Technology ›› 2022, Vol. 51 ›› Issue (5) : 61-69. DOI: 10.16490/j.cnki.issn.1001-3660.2022.05.007

Effect of Nitrogen Surface Modification on Tribology and Corrosion Behavior of Amorphous Carbon Coating

  • LI Hao1, LI Shu-yu1, KE Pei-ling1, WANG Ai-ying1, ZHENG He2, GUO Peng3, SUN Li-li3
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Abstract

N-doped surface modification was carried out on the surface of intrinsic hydrogen free amorphous carbon coating, and the evolution law of its friction properties and seawater corrosion behavior was studied, which provided a new idea for the application of marine protective amorphous carbon coating. Amorphous carbon coating was prepared by DC magnetron sputtering on solid graphite target, and n-doped surface modification was carried out on the top layer. Change the Ar/N2 gas flow ratio to control the N content in the top layer, adjust the deposition time and control the coating thickness. SEM was used to characterize the coating thickness and cross-section morphology, XPS and Raman spectra were used to characterize the N-doping content and carbon bond structure of the coating, respectively. The mechanical properties and dynamic friction coefficient of the coating were measured by continuous stiffness mode nano indentation instrument and ball disc friction tester. Gamry electrochemical workstation with three electrode system was used to measure the electrochemical properties of the coating, such as potentiodynamic polarization curve and electrochemical AC impedance spectroscopy.

Key words

amorphous carbon; friction; corrosion; magnetron sputtering; nitrogen doping; surface modification

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LI Hao, ZHENG He, LI Shu-yu, GUO Peng, SUN Li-li, KE Pei-ling, WANG Ai-ying. Effect of Nitrogen Surface Modification on Tribology and Corrosion Behavior of Amorphous Carbon Coating[J]. Surface Technology. 2022, 51(5): 61-69
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