Ceramic matrix composite is a new type of thermal structure material, which is widely used in industry, aerospace and other fields. In this paper, the research progress of traditional machining, ultrasonic assisted machining, laser machining and multi-energy field composite machining of ceramic matrix composites is reviewed, and the advantages and disadvantages of several machining methods are briefly described. In this paper, the mechanism of surface and subsurface damage of ceramic matrix composites is summarized and analyzed, including the forms of surface and subsurface damage, the theory and model of surface and subsurface damage. In order to reduce machining defects, the traditional machining technology of ceramic matrix composites requires further optimization of tool materials, development of new tool structures and optimization of process parameters. It is necessary to further study the damage tolerance conditions under the condition of the maximum material removal rate and the property retention of the material after processing. Meanwhile, it is necessary to explore the new efficient and high-quality multi-energy field composite processing method and its application theory. The damage mechanism and evolution of ceramic matrix composites under complex loading and dynamic loading such as dynamic cutting force, high temperature cutting and ultrasonic dynamic impact load are also explored.