The work aims to study the variation law of surface integrity of ultrasonic elliptical vibration cutting of tungsten alloy and provide a theoretical basis for the processing of tungsten alloy with a high surface integrity. Single-factor tests were designed to carry out ultrasonic elliptical vibration cutting tests on tungsten alloys using single-crystal diamond tools and compared with ordinary cutting to investigate the effects of ultrasonic elliptical vibration on the surface morphology, surface roughness, microstructure, dislocation density, microhardness and surface residual stress of the workpiece at different depths of cut. Whether using conventional cutting or ultrasonic elliptical vibration cutting, the surface dislocation density, microhardness, and residual stress of the workpiece were all increased with the depth of cut increasing and the workpiece will experience large strain and high strain rate, which would lead to a certain degree of plastic deformation and grain refinement. Compared with conventional cutting, ultrasonic elliptical vibration cutting could effectively suppress the generation of scaly spines and furrows due to the intermittent contact characteristic between the tool and the workpiece and reduce the surface roughness. Moreover, the surface hardening and residual compressive stress of the workpiece processed by ultrasonic elliptical vibration cutting were higher. And the dislocations in the tungsten phase and the bonding phase were with the higher dislocation density, which was on the order of 108 mm–2. In addition, the workpiece, which processed by ultrasonic elliptical vibration cutting, generated less. Compared with conventional cutting, ultrasonic elliptical vibration cutting can decrease surface roughness surface quality, increase the surface residual compressive stress and improve the surface integrity of the tungsten alloy workpiece.