To study the effect of Si, C single element doping and Si, C co-doping on the properties of TiAlN coating. nc-(Ti,Al)N, nc-(Ti,Al)N/a-SiNx, nc-TiAlCN and nc-TiAlCN/a-SiNx/a-C nanocomposite films were prepared on SUS304 stainless steel substrate and cemented carbide tools by the cathodic arc and glow discharge technology. The microstructure of the coating was observed by SEM, and the element composition was characterized by EDS. The phase composition was analyzed by XRD to explore the effect of C and Si on the performance of the coating. The coating hardness was measured by nano hardness tester, the surface roughness and morphology were characterized by two-dimensional profilometer and three-dimensional profilometer, the wear resistance was measured by sliding friction and wear test, and the friction coefficient and the bonding strength between the coating and the substrate were measured by nano scratch tester, cutting performance of the coating was characterized by milling experiment. The hardness of TiAlN coating is 29.57 GPa, which is mainly attributed to the formation of Ti2AlN, Ti2N, and other hard phases, and the formation of the TiN0.3 phase reduces the lattice constant of the coating. The coating containing the TiN0.3 phase prepared by physical vapor deposition is reported for the first time. The hardness of TiAlSiN coating is the highest, which is 37.69 GPa, and the wear resistance is the best. The main reason is that the addition of Si plays the role of fine grain strengthening and grain boundary strengthening. C-doped TiAlN can precipitate a more amorphous phase and decrease the hardness of the coating. The addition of C and Si elements makes nc-TiAlCN/a-SiNx/a-C coating show lower friction coefficient and surface roughness, but the bonding performance with the substrate is the worst, and the bonding strength of nc-(Ti,Al)N/a-SiNx coating is the best. The microhardness of the substrate surface is improved by the coating. The doping of Si and C elements can greatly improve some properties of the coating. However, in practical application, the appropriate coating should be selected according to the application requirements.