PDF(3910 KB)
Effect of Bias Voltage on Structure and Properties of Tetrahedral Amorphous Carbon Film
LI Hong, LI Yu-ting, LIN Song-sheng, SHI Qian, GUO Chao-qian, SU Yi-fan, DAI Ming-jiang
Surface Technology ›› 2021, Vol. 50 ›› Issue (3) : 284-292.
PDF(3910 KB)
PDF(3910 KB)
Effect of Bias Voltage on Structure and Properties of Tetrahedral Amorphous Carbon Film
tetrahedral amorphous carbon film; bias voltage; arc ion plating; structure and property
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