In order to reduce the residual stress of the cladding layer and control the substrate deformation, the influence of different scanning patterns on the residual stress distribution of the cladding layer and the substrate deformation produced by hollow-ring laser is investigated. The mechanism of the substrate deformation evolution process is revealed as well. This paper firstly establishes a single-track model by the finite element analysis software ANSYS APDL programming language to study the substrate deformation mechanism during the cladding process, secondly builds a multi-track finite element model to simulate the influence of six different scanning patterns on the residual stress of cladding layer and the substrate deformation, and experimentally studies the substrate deformation amounts based on “hollow-beam, inside-beam powder feeding” process. The results show that the substrate deformation direction is opposite of the light source at the initial stage of laser cladding, and then faces the light source after cooling. From the perspective of reducing the residual stress of the cladding layer, the superiority of different scanning patterns is:reciprocating scanning along the long path > reciprocating scanning along the short path, outer spiral scanning > partition scanning > internal spiral scanning > reciprocating scanning, while from the perspective of reducing the substrate deformation, that is:reciprocating scanning along the long path > reciprocating scanning along the short path, partition scanning > internal spiral scanning > outer spiral scanning > reciprocating scanning. The experimental measurement results show that the trend of substrate deformation degree is consistent with the numerical simulation results, which verifies the correctness of the numerical simulation. The residual stress level is basically positively related to the substrate deformation degree under different scanning patterns. Finally, combining the analysis indicators of equivalent residual stress and substrate warpage deformation, it can be concluded that the partition scanning pattern can significantly reduce the residual stress of the cladding layer and alleviate the substrate deformation, which provides a reference for improving the path planning of hollow-ring laser cladding quality.