Effect of Deposition Pressure on Structure and Tribological Properties of La-Ti/WS2 Composite Films Prepared by Magnetron Sputtering

CAI Hai-chao, XUE Yu-jun, WANG Jing-hua, YE Jun, HE Jiang-tao

Surface Technology ›› 2020, Vol. 49 ›› Issue (7) : 168-174.

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Surface Technology ›› 2020, Vol. 49 ›› Issue (7) : 168-174. DOI: 10.16490/j.cnki.issn.1001-3660.2020.07.021
Surface Friction Wear and Lubrication

Effect of Deposition Pressure on Structure and Tribological Properties of La-Ti/WS2 Composite Films Prepared by Magnetron Sputtering

  • CAI Hai-chao1, YE Jun1, XUE Yu-jun2, WANG Jing-hua3, HE Jiang-tao4
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Abstract

The work aims to research the effect of deposition pressure on the microstructure and tribological properties of La-Ti/WS2 composite films prepared by magnetron sputtering. La-Ti/WS2 composite films and WS2 films were prepared by unbalanced RF magnetron sputtering. Scanning electron microscopy (SEM) and X-ray diffraction (XRD) were used to characterize the microstructure, composition and crystal structure of the films. The mechanical properties and friction and wear properties of the films were tested by nano indentation, tribometer and white light interfering profilometer. The microstructure of WS2 composite films could be improved by doping La and Ti. The La-Ti/WS2 composite films showed island like growth mode under the given deposition pressure, and the structure was uniform and compact. With the increase of deposition pressure, the diffraction peak of WS2(002) shifted to a higher value of θ, the crystal surface spacing decreased, and the crystal lattice contracted. With the increase of deposition pressure, the hardness and elastic modulus of the composite films increased first and then decreased. When the deposition pressure was 1.2 Pa, the friction coefficient of La-Ti/WS2 composite film was as low as about 0.07, and the wear rate was as low as 2.45×10–8 mm3/(N?m). The deposition pressure has a great influence on the properties of La-Ti/WS2 composite films. Appropriate deposition pressure could improve the tribological properties of La-Ti/WS2 composite films.

Key words

deposition pressure; magnetron sputtering; La-Ti/WS2 composite film; friction coefficient; wear

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CAI Hai-chao, XUE Yu-jun, WANG Jing-hua, YE Jun, HE Jiang-tao. Effect of Deposition Pressure on Structure and Tribological Properties of La-Ti/WS2 Composite Films Prepared by Magnetron Sputtering[J]. Surface Technology. 2020, 49(7): 168-174

Funding

National Defense Industrial Technology Development Program (JCKY2018419C101); Project of Science and Technology Development of Henan Province (202102210073)
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