PDF(15097 KB)
Effect of High Magnetic Field on Surface Texture of Alkaline Solution Corroded Polysilicon
SONG Jian-yu, ZHAO Wei-yi, QI Dong-li, JIA Zi-fan, SHEN Long-hai, LI Xiang
Surface Technology ›› 2020, Vol. 49 ›› Issue (7) : 120-125.
PDF(15097 KB)
PDF(15097 KB)
Effect of High Magnetic Field on Surface Texture of Alkaline Solution Corroded Polysilicon
high magnetic field; alkali etching; polysilicon; Lorentz force; surface texture
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