The paper aims to investigate the effect of vacuum heat treatment on the bond coating prepared by PS-PVD, and the effect of the bond coating prepared by PS-PVD on the performance of thermal barrier coating. Bond coatings and ceramic coatings of different material systems were deposited on the high-temperature alloy substrate by PS-PVD technology. And the vacuum heat treatment experiment and high temperature oxidation test were conducted to analyze the bond coating/substrate interface elements diffusion behavior and the effect of different bond coatings on oxidation resistance of thermal barrier coating, respectively. The phase compositions and elements distribution of the coating were characterized by X-ray diffraction and EDS analysis. There was no significant difference in the phase composition of the ceramic layer near the bond coating of the obtained thermal barrier coatings with different bond coating. The elements diffusion of the bond coating and the substrate was affected by the vacuum heat treatment time and temperature. With the extension of the vacuum heat treatment time, the aluminum-rich phase of near the substrate gradually increased. The width of the diffusion zone exceeded 20 μm after heat treatment of 8 h. And as the heat treatment temperature increased, a wider diffusion zone also formed. For NiCoCrAlYTa/7YSZ thermal barrier coating, the TGO thickness reached 4.0 μm after 100 h of oxidation and the coating detached after oxidation of 150 h. While for the NiCrAlY/7YSZ thermal barrier coating, the thickness of the TGO layer was 4.4 μm and no detachment was detected after 150 h of oxidation. The longer the heat treatment time, the higher the temperature, the more intense the elements diffusion behavior of the bond coating and the matrix. Different bond coatings materials can affect the oxidation kinetics of the thermal barrier coatings.