The work aims to prepare TaWTiVCr high-entropy alloy thin films with different element compositions by co-deposition with magnetron sputtering equipment, and characterize the mechanical properties of the films, to provide screening basis for optimal alloy element composition. The elemental compositions of thin film were adjusted by tuning the deposition currents of the two TaW and TiVCr targets. X-ray diffractometer (XRD), scanning electron microscope (SEM), energy dispersive X-ray spectrometer (EDX) and atomic force microscope (AFM) were used to study the surface morphology, roughness, elemental composition, and phase structure of the film with different elemental compositions. The nanoindentation method was used to analyze the hardness and modulus of the material. The wear resistance of the material was analyzed by reciprocating wear experiments, and the wear volume was calculated with Confocal Laser Scanning Microscope (CLSM). At the same time, the experimental data of mechanical properties and the results of thermodynamic calculations were combined for analysis. With the increase of Ti, V, and Cr content, the crystallinity deteriorated, and transformed from BCC crystal structure to BCC+amorphous mixed structure. The surface morphology changed from a fold-like morphology to a pit-like morphology, with the formation of tiny agglomerated particles. The hardness and modulus firstly increased and then decreased. Ta24W25Ti16V18Cr17 film had the best mechanical properties under the action of multiple strengthening mechanisms, and the hardness and modulus reached 27.61 GPa and 274.42 GPa, respectively. At the same time, due to higher hardness and special surface morphology, the film showed a lower average friction coefficient and wear rate of 0.34 and 5.01×10-9 mm3/(N?mm), respectively and had excellent wear resistance. Preparation and characterization of high-entropy alloy films by co-deposition method can quickly screen the optimal elemental composition of TaWTiVCr high-entropy alloys. Under the specific elemental composition, the formation of BBC and amorphous mixed structure helps to improve the mechanical properties of the material.