Silicon-containing amorphous carbon films, via adjusting silane flow rates (0~10 mL/min), were deposited on the surface of the titanium alloy by plasma enhanced chemical vapor deposition to improve the performance of the titanium alloy bipolar plate. The corrosion resistance, conductivity, hydrophobicity, and mechanical properties of the silicon-containing amorphous carbon film were tested by electrochemical workstation, interface contact resistance measuring instrument, water contact angle measuring instrument and nano-indentation instrument. The internal hybridization ratio of the films before and after corrosion were analyzed by Raman spectroscopy. The thickness, corrosion morphology and internal structure of the films were explored by scanning electron microscope and high-resolution transmission electron microscope. The silicon-containing amorphous carbon film, which prepared under the silane flow rate of 8 mL/min (a-C:Si(8)), with hardness and elastic modulus of about 9.28 GPa and 60.34 GPa, have the best corrosion resistance and conductivity. Its dynamic potential corrosion current density was 0.017 μA/cm2, lower by 3 magnitudes than that of titanium alloy substrate (80.51 μA/cm2). For the a-C:Si(8) film, Its interface contact resistance was 47.06 mΩ?cm2 (1.4 MPa), and its water contact angle was 102.91°, and its thickness was 2.822 μm, respectively. After corrosion the surface of this film was not significantly damaged compared to other films. Through high- resolution transmission electron microscopy, it was found that the introduction of silicon could induce the amorphous carbon film to generate graphene-like sheets, which could improve the electrical conductivity and corrosion resistance of the amorphous carbon film, and also improve the mechanical properties and hydrophobicity of the film. Our results suggest that the surface modification of the titanium alloy bipolar plate by the silicon-containing amorphous carbon film could effectively improve the fuel cell performance of the bipolar plate.