PDF(13669 KB)
Effect of Deposition Pressure on Tribological Properties of WS2 Films by Magnetron Sputtering
HE Jiang-tao, CAI Hai-chao, XUE Yu-jun
Surface Technology ›› 2020, Vol. 49 ›› Issue (4) : 180-187.
PDF(13669 KB)
PDF(13669 KB)
Effect of Deposition Pressure on Tribological Properties of WS2 Films by Magnetron Sputtering
deposition pressure; magnetron sputtering; WS2 film; friction coefficient; wear rate
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