To establish the mathematical model from belt grinding parameters to residual stress on grinding surface of titanium alloy material and verify its validity. In this paper, the microstructure model of material surface was established by using elastic mechanics and collision mechanics. After the mathematical model was obtained through the analysis and calculation of the mechanical model, use Simulink to realize the simulation analysis of the mechanical model, obtained the relation diagram of residual stress and time on belt grinding surface of titanium alloy with certain grinding parameters. Finally, verify the validity of the mathematical model by the experiment of titanium alloy belt grinding and analyze the possible error sources. As a result, the experiment show that the simulation value of the mathematical model is similar to the measured value and has a good simulation effect. However, before the introduction of t, the maximum error of the simulation value and the measured value is 62.98%, the average error is 16.43%, the result is not ideal; And after the introduction of heat coefficient tau, the maximum error of the simulation value and the measured values is 9.87%, average error is 5.75%, precision rise significantly, can effectively predict the surface residual stress values. Based on elastic mechanics and collision mechanics, the model of residual stress formation on grinding surface of titanium alloy can be used to characterize the residual stress under certain machining parameters.