PDF(10659 KB)
Effect of Bias on Structure and Tribological Properties of Diamond-like Carbon Films
LIU Chang-xin, LI Lu-lu, WANG Shao-feng, YANG Qing-xiang, ZHOU Ye-fei
Surface Technology ›› 2020, Vol. 49 ›› Issue (3) : 141-147.
PDF(10659 KB)
PDF(10659 KB)
Effect of Bias on Structure and Tribological Properties of Diamond-like Carbon Films
DLC film; magnetron sputtering deposition; bias; microstructure; wear resistance
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