The work aims to prepare a composite film with good tribological properties to improve the surface properties of GH4169 alloy. NiCrAlY/Ag composite films was prepared by ion source assisted DC magnetron sputtering at 60 ℃, 120 ℃, and 180 ℃. Effects of deposition temperature on the structure and properties of films were investigated. The elemental composition, surface morphologies, cross-sectional morphologies, surface roughness, and phase structure of the films were analyzed with energy dispersive spectroscopy (EDS), scanning electron microscopy (SEM), atomic force microscopy (AFM) and X-ray diffraction (XRD). The hardness, adhesion strength, friction and wear properties of the films were analyzed with nanoindentation tester, scratch test and ball-on-disk friction and wear tester. With the increase of deposition temperature, the surface density, grain size and surface roughness of NiCrAlY/Ag composite films increased, phase structures of the films were mainly Ni3Al, Ag and Cr. The hardness of the films was slightly different at the range of 5.67~6.41 GPa. With the increase of deposition temperature, the adhesion strength of the composite films decreased. The samples deposited at 60 ℃ showed the best adhesion strength of 33.1 N, as well as good tribological properties with friction coefficient of 0.24 and wear rate of 3.52×10–5 mm3/(N?m). The wear mechanism was oxidative wear and abrasive wear. Thus the deposition temperature has a significant effect on the structural and properties of NiCrAlY/Ag composite films. The films deposited at 60 ℃ shows the best comprehensive performance.