The Co-Tio2 nanoparticle composite film has high magnetic strength and resistivity at the same time, so as to achieve better high-frequency soft magnetic properties. Co-TiO2 nanoparticle composite films were prepared by magnetron co-sputtering under different metal target power parameters, and effects of metal content on the microstructure, surface morphology and electrical and static magnetic properties of the films were systematically investigated. Metal particles in the film were found to be dispersed by amorphous TiO2. The increase of metal content could significantly improve the crystallinity of metal particles in nanoparticle films, reduce the resistivity of films, and gradually transform the film from superparamagnetic state to ferromagnetic state by changing the metal content, thus realizing the accurate regulation of the magnetic and electrical properties of nanoparticle composite films. When the metal content reaches 54%, the high resistivity and high saturation magnetization can coexist, which is expected to obtain the nanoparticle composite films with high frequency soft magnetic characteristics.