The types and characteristics of typical low temperature thermal diffusive technologies were overviewed. The material system of low temperature thermal diffusion technology and the effect of alloying elements on the formation and stability of low temperature thermal diffusion layer on stainless steel surface were summarized. The development status and achievements of preparation technology for low temperature thermal diffusion layer on austenitic stainless steel surface and the stability of “expanded” γ phase layer were emphasized, including nitrogen-containing “expanded” γ phase layer prepared by low temperature nitriding technology, carbon-containing “expanded” γ phase layer prepared by low temperature carburizing technology, as well as nitrogen and carbon-containing “expanded” γ phase layer prepared by low temperature nitrocarburizing, low temperature nitriding + low temperature carburizing or low temperature carburizing + low temperature nitriding composite technologies. The stability of low temperature diffusion layers and the influence of alloying elements were also reviewed, including gas method, liquid method, plasma method and plasma annihilation injection method. At the same time, the preparation technologies of low temperature thermal diffusion layer on Co-Cr alloy, high-entropy alloy, martensitic stainless steel and ferritic stainless steel as well as the research status of stability of “expanded” α phase layer were reviewed. Based on the analysis of the research status of preparation and thermal stability of low temperature thermal diffusion layer on stainless steel surface, the future research directions in the field of low temperature thermal diffusion layer on stainless steel surface, especially the stability of low temperature thermal diffusion layer, are prospected.