PDF(5922 KB)
Performance of Gradient Cr-DLC Film Prepared by RF Enhanced Magnetron Sputtering
HUANG Ke, LIU Wen-jun, TAN Ke, LUO Shu-jing
Surface Technology ›› 2019, Vol. 48 ›› Issue (9) : 287-292.
PDF(5922 KB)
PDF(5922 KB)
Performance of Gradient Cr-DLC Film Prepared by RF Enhanced Magnetron Sputtering
RF enhanced magnetron sputtering; gradient film; RF power; adhesion property; interlayer
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